One-dimensional micro-displacement table

A technology of micro-displacement and micro-displacement sensor, which is applied in the field of displacement stage, and can solve problems such as limited driving capacity, small driving force, and small micro-displacement range

Pending Publication Date: 2017-12-19
苏州迈客荣自动化技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Existing devices for realizing micro-displacement driving include one-dimensional micro-displacement stages. The current micro-displacement stages generally drive the mo...

Method used

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Embodiment Construction

[0016] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0017] see Figure 1 to Figure 3 A one-dimensional micro-displacement stage according to a preferred embodiment of the present invention includes a bottom frame 1, a mobile platform 2 is arranged in the bottom frame, a driving device is arranged between the mobile platform and the bottom frame, and the driving device includes two groups of drivers 3 Each group of drivers includes two diamond-shaped ceramic drivers 4 connected in series, and one end of one diamond-shaped ceramic driver is connected to the bottom frame, and one end of the other diamond-shaped ceramic driver is connected to the mobile platform, and a micro-displacement sensor 5 is also arranged in the bottom ...

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Abstract

The invention relates to a one-dimensional micro-displacement table. The one-dimensional micro-displacement table comprises a bottom frame, wherein a movable table is arranged in the bottom frame; a drive device is arranged between the movable table and the bottom frame; the drive device comprises two groups of drivers; each group of drivers comprises two rhombic ceramic drivers which are connected in series; a micro-displacement sensor is further arranged in the bottom frame; each rhombic ceramic driver comprises two first connecting parts which are oppositely arranged and two second connecting parts which are oppositely arranged, and connecting arms are arranged between the first connecting parts and the second connecting parts; and a piezoelectric ceramic driver is arranged between the two second connecting parts, the piezoelectric ceramic driver comprises a mounting box, and piezoelectric ceramic, a first drive arm and a second drive arm are arranged in the mounting box. The one-dimensional micro-displacement table is relatively great in drive force and output range.

Description

technical field [0001] The invention relates to a displacement platform, in particular to a one-dimensional micro displacement platform. Background technique [0002] Piezoelectric ceramics are information functional ceramic materials that can convert mechanical energy and electrical energy into each other. In addition to piezoelectricity, piezoelectric ceramics also have dielectric properties, elasticity, etc., and have been widely used in medical imaging, acoustic sensors, acoustic transducers, ultrasonic motors, etc. In addition, people can also use the inverse piezoelectric effect to make it into a piezoelectric driver to achieve micro-displacement driving of objects. Existing devices for realizing micro-displacement driving include one-dimensional micro-displacement stages. The current micro-displacement stages generally drive the movement of the stage through a piezoelectric ceramic driver. The driving force is small, the driving capacity is limited, and the micro-dis...

Claims

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Application Information

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IPC IPC(8): G12B9/10G12B5/00
CPCG12B5/00G12B9/10
Inventor 钟博文孙立宁王振华张佳新
Owner 苏州迈客荣自动化技术有限公司
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