Chemical liquid temperature adjustment device, substrate processing system and method using the same
A temperature adjustment device and temperature adjustment technology, which are applied in the direction of semiconductor/solid-state device testing/measurement, electrical components, circuits, etc., can solve the problem of increasing the manufacturing cost of the heater 13 and the cooling device 15, reducing the amount of medicinal liquid, and increasing the heating Problems such as the power of the device 13 and the cooling device 15
Active Publication Date: 2020-10-30
DMS CO LTD
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Problems solved by technology
[0012] However, as mentioned above, the thermal conductivity of the material having corrosion resistance is very low compared with general metal materials, so in order to transfer heat sufficiently through the chemical solution, there are the heater 13 and the cooling device that require a large surface area. 15 questions
[0013] Therefore, the volumes of the heater 13 and the cooling device 15 occupy the inner space of the chamber 11 inefficiently, thereby causing a problem that the amount of the liquid medicine contained in the chamber 11 decreases.
[0014] And, because the volume increase of the heater 13 and the cooling device 15 not only increases the manufacturing cost of the heater 13 and the cooling device 15, but also increases the The power of the cooling device 15, so there is a problem of economic loss
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[0034] Hereinafter, preferred embodiments of the present invention capable of realizing the above-mentioned problems to be solved will be described with reference to the drawings. In the description of this embodiment, the same name and the same symbol are used for the same structure, and additional description of the content is omitted.
[0035] refer to Figure 2 to Figure 3 , as follows according to the liquid medicine temperature regulating device of the present invention:
[0036] Such as Figure 2 to Figure 3 As shown, the liquid medicine temperature regulating device according to the present invention includes: a liquid storage tank 20 , a liquid medicine circulation pipe unit 40 , a liquid medicine temperature regulating unit and a liquid medicine circulation pump.
[0037] The liquid storage tank 20 stores the chemical liquid C for processing the substrate P. As shown in FIG. Preferably, the liquid storage tank 20 is made of corrosion-resistant material so as not t...
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The present invention relates to a liquid temperature adjusting device, a substrate processing system using the same, and a substrate processing method. The device adjusts temperature of a chemical liquid of a processing substrate in real time, and the liquid temperature adjusting device is arranged out of a liquid storage tank, thereby reducing unnecessary volume in the liquid storage tank. To achieve the object, the present invention provides a liquid temperature adjusting device, comprising: a liquid storage tank accommodating a chemical liquid of the processing substrate; a liquid temperature adjusting unit independently disposed out of the liquid storage tank and adjusting temperature of the liquid, a liquid circulation pipe unit connecting the liquid storage tank and the liquid temperature adjusting unit, to guide the liquid to move; and a liquid medicine circulation pump that circulates the liquid to allow the liquid contained in the liquid storage tank and the liquid temperature adjusting unit to be mixed.
Description
technical field [0001] The present invention relates to a chemical liquid temperature adjustment device, a substrate processing system using the same, and a substrate processing method. More specifically, it relates to real-time adjustment of the temperature of the chemical liquid used to process the substrate, and placing the chemical liquid temperature adjustment device outside, thereby A chemical liquid temperature adjustment device capable of reducing unnecessary volume in the internal space of a liquid storage tank, a substrate processing system and a substrate processing method using the same. Background technique [0002] Generally speaking, a substrate processing device for performing a semiconductor process and an LCD (Liquid Crystal Display, Liquid Crystal Display) process utilizes various chemical solutions to perform a substrate process. [0003] For example, a substrate processing apparatus performs an etching process, a cleaning process, etc. for processing a s...
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IPC IPC(8): H01L21/67
CPCH01L21/02052H01L21/02307H01L21/02343H01L21/67098H01L21/67248H01L22/12
Inventor 朴庸硕金珉植朴镐胤朴康淳赵才衍
Owner DMS CO LTD