A high-precision standard gas dynamic mixing system and a method for controlling the ratio precision

Abstract

The invention provides a high-precision standard gas dynamic mixing system and a matching accuracy control method. The high-precision standard gas dynamic mixing system consists of a feed gas conveying part, an electric control part, a DCS / PLC configuration real-time control part and a vacuum-pumping system, wherein the feed gas conveying part comprises a plurality of feed component gas input ports and a plurality of balance gas input ports, which are connected with a packaging confluence gas exhaust and storage device, and the feed component gas input ports and the balance gas input ports arecorrespondingly connected with respective pressure gauges and high-purity gas filtering devices; and the electric control part and the DCS / PLC configuration real-time control part comprise a component gas mass flow rate controller, a metering electronic scale and a DCS / PLC configuration controller which are arranged on a feed component gas conveying pipeline, as well as a pneumatic diaphragm valve arranged on a conveying pipeline, the component gas mass flow rate controller feeds back component gas flow rate information, and the DCS / PLC configuration controller is connected with a pressure sensor and a temperature sensor and serves as a signal feedback point, and the component gas filling pressure and the filling quality serve as fuzzy-PID feedback control input parameters. The high-precision standard gas dynamic mixing system is suitable for production of the industrial standard gas, and has the characteristics of relative small preparation accuracy error, high standard gas preparation qualification rate and the like.

Description

technical field [0001] The present invention relates to a dynamic mixing system of high-precision standard gas and a method for controlling the ratio precision. Specifically, the gas distribution device and the corresponding control method are used to dynamically realize the preparation of various high-demand standard gases, namely The raw material gas and diluent gas of known concentration are filled into the steel cylinder in sequence according to the principle of two-way calibration of gas quality and filling pressure, so as to realize the preparation of qualified standard gas. Background technique [0002] At present, there are two main methods for preparing industrial-grade standard gas: one-time preparation method and intermediate gas dilution method. The one-time preparation method is to add the calculated gas volume of the components into a steel cylinder container with a specified volume, then fill in the balance gas, and mix well. The amount of component gas added...

AI Technical Summary

Problems solved by technology

However, due to the low degree of automation of the existing intermediate gas dilution standard gas preparation equipment and strong dependence on operators, the pass rate of standard gas preparation fluctuates greatly with changes in production schedules, thus limiting the intermediate gas dilution method Industrial production standard gas

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