Gantry-type ultrahigh-speed repetitive detection apparatus with both end support arm structures
A technology of repeated detection and detection device, applied in the direction of measurement device, optical device, special recording/indicating device, etc., can solve the problems of prolonging measurement time, increasing production cost, increasing the capacity of linear motor, etc., to expand the measurement range, The effect of shortening the measurement time
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[0036] Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. In this process, in order to improve the clarity and convenience of description, the thickness of lines and the sizes of components shown in the drawings may be displayed exaggeratedly.
[0037] In addition, the terms mentioned below are terms defined in consideration of the functions of the present invention, and may vary depending on the intention or practice of users or references. Therefore, such terms should be defined based on the entire content of this specification.
[0038] Moreover, the following examples are not intended to limit the scope of rights of the present invention, but are merely examples of constituent elements in the scope of claims of the present invention, and are included in the technical ideas of the entire specification of the present invention, and have Embodiments in which constituent elements within the scope of the c...
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