Detection method of detection device and detection device

Abstract

One embodiment of the invention discloses a detection method of a detection device and a detection device. The detection method comprises following steps: obtaining a plurality of first detection dataof a plurality of acquisition devices of a first detection device, wherein the first detection data of the first acquisition devices is used as the standard detection data; processing the standard detection data with the multiple first detection data; obtaining first compensation values corresponding to the plurality of first detection data according to the processing result. The invention provides a detection method of a detection device and a detection device, which can reduce the detection error between different detection devices, improve the accuracy of detection and further simplify thedetection steps when detecting the same measured object.

Description

technical field [0001] The embodiments of the present invention relate to the technical field of data processing, and in particular to a detection method and a detection device of a detection device. Background technique [0002] Liquid crystal display has become the mainstream product in the current display field due to its excellent performance, low raw material cost, and wide development space. For example, a thin film transistor liquid crystal display (Thin Film Transistor Liquid Crystal Display, TFT-LCD) has significant advantages in brightness, contrast, power consumption, lifespan, volume and weight. [0003] In the photolithography, deposition, coating and other processes of the TFT-LCD manufacturing process, it is necessary to detect the etching depth, deposition height, coating thickness, etc., and the results of different detection methods or equipment may have deviations. This kind of deviation caused by the detection of the same object between devices is called...

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Problems solved by technology

[0004] However, it needs multiple measurements and calculations to obtain the value that needs to be added, and the deviation caused by factors such as the environment and the stability of the equipment during each measurement requires the equipment to be measured before each use. This will increase the burden on personnel and bring inconvenience to the detection

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