Semiconductor device
A semiconductor, conductive type technology, applied in the fields of semiconductor devices, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of reduced switching speed, large feedback capacitance, etc., to achieve the effect of reducing feedback capacitance
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[0094] As mentioned above, although this invention was described using embodiment, it should not be understood that the description and drawing which make a part of this indication limit this invention. It is obvious that various alternative embodiments, examples, and applied techniques can be conceived by those skilled in the art from the present disclosure.
[0095] The above shows an example where the semiconductor device is an IGBT. However, the semiconductor device may also be a switching element of another trench gate type structure. Figure 14 An example in which the semiconductor device is a trench gate MOSFET is shown. Figure 14 The illustrated semiconductor device is a MOSFET having a structure in which an n-type drain region 160 is disposed on the lower surface of the drift region 10 . A drain electrode 180 electrically connected to the drain region 160 is disposed on the lower surface of the drain region 160 .
[0096] even if Figure 14 In the MOSFET semicond...
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