Graphene film-based pressure detection equipment
A technology of graphene film and detection equipment, which is applied in the direction of fluid pressure measurement using piezoelectric devices and the measurement of property forces using piezoelectric devices, etc., which can solve the problem of inability to accurately evaluate the surface pressure of graphene films and the inability to obtain graphene films Stress situation and distribution, restricting the application of graphene film and other issues, to achieve the effect of easy and intuitive analysis, flexible use, and expanding the scope of application
Pending Publication Date: 2018-03-09
全普半导体科技(深圳)有限公司
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Problems solved by technology
When a graphene film with a flat surface is used in pressure detection, the traditional method is to use the entire graphene film to obtain a piezoelectric signal, which can only make an overall evaluation of the pressure on the graphene film, but cannot obtain the points of the graphene film. When the force on the surface of the graphene film is not uniform, the pressure on the surface of the graphene film cannot be accurately evaluated, which seriously restricts the application of the graphene film in pressure detection.
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[0046] In order to make the content of the present invention clearer and easier to understand, the content of the present invention will be further described below in conjunction with the accompanying drawings. Of course, the present invention is not limited to this specific embodiment, and general replacements known to those skilled in the art are also covered within the protection scope of the present invention.
[0047]In the present invention, the graphene film-based pressure detection equipment includes: a graphene film for detecting pressure, a locator, a marker, a converter, and a display; wherein, the graphene film has a plurality of pressure detection areas, and each pressure The graphene film in the detection area detects the pressure acting on it and outputs an electrical signal to the converter; the locator locates each pressure detection area and assigns the corresponding position coordinates to each pressure detection area; multiple markers and each Each pressure...
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Abstract
The invention provides a graphene film-based pressure detection equipment. The stress condition of each position of a graphene film is obtained by utilizing a plurality of pressure detection regions of the graphene film. A positioner and a marker are adopted to obtain the position coordinates of each pressure detection region. Meanwhile, electric signals output by the corresponding pressure detection regions are simultaneously output to a converter, so that the position of an electric signal output by each pressure detection region is marked. That means, the electric signal output by each pressure detection region is provided with corresponding position coordinates. Therefore, pressure distribution data on the graphene film is established through the identification of the converter. Afterthat, the pressure distribution data are displayed through a display, so that the intuitive analysis is facilitated. Furthermore, the graphene pressure detection equipment can be flexible film type,thus being wearable and adaptive to various structures. As a result, the application range of the graphene pressure detection equipment is expanded, so that the use of the graphene film-based pressuredetection equipment is more flexible.
Description
technical field [0001] The invention relates to the technical field of semiconductors, in particular to a pressure detection device based on a graphene film. Background technique [0002] With the development of semiconductor technology and the continuous reduction of technology nodes, traditional silicon materials have shown many limitations and defects. Since graphene is a new type of nanomaterial with the thinnest, highest strength, and strongest electrical and thermal conductivity in the world, So graphene becomes an ideal substitute for silicon. [0003] However, traditional graphene films use flat surfaces both macroscopically and microscopically, including monoatomic layer graphene, which is a flat surface in the microscopic sense. When a graphene film with a flat surface is used in pressure detection, the traditional method is to use the entire graphene film to obtain a piezoelectric signal, which can only make an overall evaluation of the pressure on the graphene f...
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IPC IPC(8): G01L1/16G01L9/08
CPCG01L1/16G01L9/08
Inventor 汪际军
Owner 全普半导体科技(深圳)有限公司