Epitaxial wafer cleaning device and cleaning process for LED production
A technology for cleaning devices and epitaxial wafers, which can be applied to cleaning methods using liquids, cleaning methods using tools, cleaning methods and utensils, etc. Damaged, high cleaning efficiency, good cleaning effect
Active Publication Date: 2020-04-14
ANHUI SHILIN LIGHTING
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Problems solved by technology
The heart of the LED is a semiconductor wafer. The semiconductor wafer is also called an epitaxial wafer. The epitaxial wafer is cut from a processed single crystal silicon rod. Pollutants will reduce the quality of LED lamps, thereby reducing the amount of finished products of LED lamps. Therefore, the epitaxial wafers need to be cleaned. At present, the epitaxial wafers are generally cleaned manually with a cleaning solution. Manual cleaning is time-consuming, laborious and efficient. Low, and manual hand washing needs to be soaked in the cleaning solution for a long time, which will affect the health of workers
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[0023] In order to make the technical means, creative features, goals and effects achieved by the present invention easy to understand, the present invention will be further described below in conjunction with specific embodiments.
[0024] Such as figure 1 and 2 As shown, this embodiment provides an epitaxial wafer cleaning device for LED production, which includes a bracket, and mounting frames are fixed on both sides of the bracket, and multiple sets of epitaxial wafer clamping mechanisms are connected to the mounting frame through springs. A scrubbing mechanism driven by an air cylinder that can slide along the chute on the bracket is provided between the clamping mechanisms, and a flushing mechanism is provided directly above the scrubbing mechanism.
[0025] Place the epitaxial wafer on the clamping mechanism to clamp it, open the flushing mechanism and the scrubbing mechanism, clean the epitaxial wafer, and then take out the epitaxial wafer after cleaning.
[0026] Fu...
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The invention discloses a cleaning device of an epitaxial wafer for LED production. The cleaning device comprises a support, wherein installation racks are fixedly arranged at two sides of the support, multiple groups of epitaxial wafer clamping mechanisms are connected to the installation racks via springs, washing mechanisms are arranged among the clamping mechanisms, are driven by an air cylinder and can slide along a sliding groove in the support, and flushing mechanisms are arranged right above the washing mechanism. During the usage of the cleaning device, the epitaxial wafer is placed on the clamping mechanism for clamping, the washing mechanisms and the flushing mechanisms are opened to clean the epitaxial wafer, and the epitaxial wafer is taken out after cleaning is completed. Thecleaning device is convenient to use and is high in cleaning efficiency and good in cleaning effect, and meanwhile, a human hand can be prevented from being damaged.
Description
technical field [0001] The invention relates to an epitaxial wafer cleaning device and a cleaning process for LED production, belonging to the technical field of LEDs. Background technique [0002] Light-emitting diode lamps, also known as LED lamps, refer to appliances that can transmit light, distribute and change the light distribution of LED light sources, including all parts and components required to fix and protect LED light sources except for LED light sources, as well as connections to power sources Required wiring accessories. With its technical characteristics of high efficiency, energy saving, safety, longevity, small size, and clear light, LED lamps are becoming the main product in the new generation lighting market, and they are powerfully driving the rapid development of the environmental protection and energy saving industry. The heart of the LED is a semiconductor wafer. The semiconductor wafer is also called an epitaxial wafer. The epitaxial wafer is cut f...
Claims
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IPC IPC(8): H01L21/67H01L21/02B08B3/02B08B1/00
CPCB08B1/002B08B3/024H01L21/02052H01L21/67023H01L21/67046H01L21/67051
Inventor 桑永树李运鹤刘军叶冰
Owner ANHUI SHILIN LIGHTING