Dynamic self-balancing structure

Abstract

The invention discloses a dynamic self-balancing structure and belongs to the technical field of MEMS (Micro Electro Mechanical System) based automatic control. The dynamic self-balancing structure comprises an upper substrate; four resistance bars, four double-end fixed suspension electrodes and four upper substrate top surface grounding electrodes are arranged at the top surface of the upper substrate; four pull-down electrode upper electrodes, four voltage division resistors, an annular DC bias electrode and an upper substrate bottom surface annular grounding electrode are arranged at the bottom surface of the upper substrate; a spherical hinge hemispherical base is fixedly connected to the center of the bottom surface of the upper substrate; a DC bias metal through hole and a groundingmetal through hole are formed in the upper substrate; a lower substrate is arranged below the upper substrate; four pull-down electrode lower electrodes, a DC bias input electrode, a DC grounding electrode, a lower substrate top surface grounding electrode and a grounding electrode connecting wire are arranged at the top surface of the lower substrate; and a spherical hinge spherical body is fixedly arranged at the lower substrate. The dynamic self-balancing structure can sense and adjust bias of the plane where the structure is, relative to the water level, in real time, and realizes dynamicself-balancing of the structure.

Description

technical field [0001] The invention relates to a dynamic self-balancing structure and method, in particular to a dynamic self-balancing structure and method based on MEMS double-end fixed-supported suspension beams, and belongs to the technical field of automatic control based on micro-electromechanical systems (MEMS). Background technique [0002] As large as airplanes and ships, as small as balance cars and mobile phones, during their operation, the body will tilt or the orientation will be deflected due to various factors, which will affect their operating status, and corresponding measures need to be taken to maintain their operation Dynamic balance in the process. [0003] The devices used to detect and control the balance state of moving objects in the prior art are mainly gyroscopes. Traditional inertial gyroscopes are mainly mechanical gyroscopes, of which liquid floating gyroscopes, dynamic gyroscopes and electrostatic gyroscopes are typical structures. The rotati...

AI Technical Summary

Problems solved by technology

The rotating gyro shaft always tries to point to a fixed direction. If two gyroscopes whose rotation axes are at right angles to each other form a platform and place the platform in the gimbal, the platform will remain stable no matter how the gimbal rotates. In this way, an inertial navigation system is formed, which is also the balance principle of a self-balancing car. However, the mechanical gyro has a complex structure and high process requirements. Its accuracy is restricted by many factors and the cost is relatively high.

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