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drying equipment

A technology of drying equipment and air knife, which is applied in the field of OLED production, can solve the problems of low drying efficiency and achieve the effect of improving work efficiency and accelerating fluidity

Active Publication Date: 2020-05-05
WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a drying device to solve the problem of low drying efficiency in the prior art

Method used

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Embodiment Construction

[0020] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the implementation manners in the present invention, all other implementation manners obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of the present invention.

[0021] see figure 1 and figure 2 , a preferred embodiment of the present invention provides a drying device, including a cavity 100, the cavity includes a bottom plate 102, the bottom plate 102 has a first plane 103, the cavity 100 is provided with a The first wind knife 10, the second wind knife 20 and the third wind knife 30, the first wind knife 10 and the third wind knife 30 are arranged oppositely, and the second win...

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Abstract

The invention provides drying equipment. The drying equipment comprises a cavity, the cavity comprises a bottom plate, and the bottom plate is provided with a first plane. A first air knife, a secondair knife and a third air knife used for blowing air are arranged in the cavity, the first air knife and the third air knife are arranged to be opposite to each other, the second air knife is locatedon one side, back to the bottom plate, of the position between the first air knife and the third air knife, the first air knife and the third air knife which are arranged to be opposite and the secondair knife and the first plane of the bottom plate form a containing space, wherein the second air knife and the bottom plate are opposite to each other, and a box-shaped container is arranged in thespace. According to the drying equipment, by forming the cavity, and arranging the first air knife, the second air knife and the third air knife blowing air out in the cavity, an air out position is additionally arranged compared with the prior art, the mobility of air is accelerated, and the working efficiency of the drying equipment is improved.

Description

technical field [0001] The invention belongs to the technical field of OLED production, and in particular relates to a drying device. Background technique [0002] The mask plate (MASK) used in the evaporation process of the OLED display device usually adopts an opening on the metal material, and the evaporation material is deposited on the substrate through the opening to form a thin film. The MASK must be cleaned after use, and it must be ensured that no stains remain on the MASK after cleaning, otherwise, each product will have the same defect. MASK cleaning is mainly carried out in a box-shaped container (cassette). Keeping the cassette clean and dry is an important means to ensure the cleanliness of the MASK. Currently, the cassette is mainly dried by means of an air duct. The existing drying method is inefficient and cannot meet the needs of production. . Contents of the invention [0003] The purpose of the present invention is to provide a drying device to solve ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F26B5/04F26B11/18F26B21/00F26B25/18
CPCF26B5/04F26B11/18F26B21/00F26B25/18
Inventor 舒林和
Owner WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD