Ultra-high impedance measurement device for capacitive type un-cooled focal plane reading circuit

Abstract

The invention discloses an ultra-high impedance measurement device for a capacitive type un-cooled focal plane reading circuit. The device comprises a capacitive type un-cooled focal plane reading circuit input-stage array and four ultra-high resistance testing structures. Through the four ultra-high resistance testing structures, the feedback resistance of the capacitive type un-cooled focal plane reading circuit can be rapidly and accurately measured by using a conventional high-resistance instrument. Ultra-high resistance test structures on the four corners of the capacitive type un-cooledfocal plane reading circuit are detected, so that the resistance value and the uniformity requirement of the input-stage feedback resistor of the reading circuit are guaranteed. Moreover, the performance of the capacitive type un-cooled focal plane reading circuit is guaranteed. Meanwhile, the performance of a focal plane detector is ensured.

Description

technical field [0001] The invention relates to an ultra-high impedance measuring device, in particular to an ultra-high impedance measuring device used in a capacitive uncooled focal plane readout circuit. technical background [0002] In the design of the capacitive uncooled focal plane readout circuit, due to the limitation of the pixel size of the uncooled focal plane detector, it is generally required to be less than or equal to 30 microns*30 microns, so that each capacitive uncooled focal plane detector The capacitance value of the pixel is very small, reaching the order of several pF. Faced with such a small detector capacitance value, the capacitive uncooled focal plane readout circuit can adopt the voltage follower (SFD) type, or the resistance feedback transconductance amplifier type (RTIA), and the best performance is the RTIA type. Since the capacitance value of the detector is on the order of pF, the feedback resistance is as high as tens of G ohms, which can m...

AI Technical Summary

Problems solved by technology

[0004] 1. Special ultra-high impedance measuring instruments are expensive;

[0005] 2. The operation of special ultra-high impedance measuring instruments is complicated, and it is difficult to perform real-time, online and accurate detection of ultra-high feedback resistance of the readout circuit;

[0006] 3. The operation of the special ultra-high impedance measuring instrument is complicated, and it is difficult to monitor the uniformity of the ultra-high feedback resistance of the readout circuit in real time

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