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Internal Wash Sprinklers with Offset Manifolds

A sprinkler and cleaning tower technology, applied in the field of cleaning systems, can solve problems affecting the yield of resident wafer products and achieve the effect of improving cleaning performance

Active Publication Date: 2022-04-22
ENTEGRIS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] During insertion or removal of a substrate from a substrate container, traces of dust, gaseous impurities, or increased humidity can be introduced into the substrate container, negatively impacting the product yield of resident wafers

Method used

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  • Internal Wash Sprinklers with Offset Manifolds
  • Internal Wash Sprinklers with Offset Manifolds
  • Internal Wash Sprinklers with Offset Manifolds

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0039] refer to figure 1 , depicts a substrate container 30 for storing a plurality of substrates according to an embodiment of the present invention. As used herein, a plurality of substrates includes substrates used in the fabrication of semiconductors, printed circuit boards, flat panel displays, and / or the like. For illustration purposes, a single substrate 32a is presented. In certain embodiments, the substrate container 30 includes two opposing side portions 34 , a top portion 36 , a floor 38 and a back 42 . The floor 38 defines an interior surface or floor 40 of the substrate container 30 . The front 44 of the substrate container 30 includes a door frame 46 defining a door opening 48 for insertion and removal of the substrate 32 . Door 52 is adapted to seal and cover door opening 48 . The door opening 48 of the substrate container 30 lies in a plane substantially parallel to the vertical direction 54 . In various embodiments, the substrate container 30 is character...

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PUM

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Abstract

The present invention provides a purge tower assembly for a substrate container. The assembly may include a clean interface body for mounting to a floor of a substrate container, the clean interface body including a base portion and a top portion. The base portion may include a substantially tubular base sidewall and the top portion may have a top sidewall positioned on a top edge of the base portion. The top portion may contain an inlet nozzle for installation through a rear inlet in the floor. The inlet nozzle may have a substantially tubular sidewall extending upwardly from the top sidewall and defining an interior of the inlet nozzle. The base portion and the top sidewall may define an offset conduit portion disposed to connect to the base portion and the inlet nozzle, the base portion and the inlet nozzle passing through the offset conduit portion fluid communication.

Description

technical field [0001] The present invention relates generally to cleaning systems for microenvironments, and more particularly to sparger towers for substrate containers. [0002] Related applications [0003] This application claims the benefit of the earlier filing dates of U.S. Patent Application No. 62 / 214,464, filed September 4, 2015, and U.S. Patent Application No. 62 / 263,194, filed December 4, 2015, which The entire contents of the application are incorporated herein by reference. Background technique [0004] During insertion or removal of a substrate from a substrate container, traces of dust, gaseous impurities, or increased humidity may be introduced into the substrate container, thereby negatively impacting the product yield of the resident wafers. Correspondingly, there is an increasing need to control the environment within these containers to achieve or maintain high levels of cleanliness during substrate processing. [0005] In some instances, the microen...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/673H01L21/02H01L21/677B65D51/16
CPCH01L21/67393H01L21/67028H01L21/67376H01L21/67379
Inventor K·格拉万J·J·金M·富勒
Owner ENTEGRIS INC