Piezoelectric positioning platform coupling inchworm bionics and parasitic motion principle and control method

Abstract

The invention relates to a piezoelectric positioning platform coupling inchworm bionics and parasitic motion principle and a control method. A driving unit, an active cell unit and a clamping unit inthe positioning platform are separately connected with a foundation support, and sheet-shaped structures on two sides of an active cell in the active cell unit are in clearance fit with grooves on output ends of the driving unit and the clamping unit. Meanwhile, periodic square wave and sawtooth wave driving voltage having a certain time sequence are separately applied to piezoelectric stacks in the clamping unit and the driving unit to realize the stepping motion of the active cell. The piezoelectric positioning platform has the advantages that various advantages of the inchworm bionics and the parasitic motion principle can be coupled, the problems that the inchworm bionic piezoelectric positioning platform piezoelectric elements are used more and the structure and control are complicated as well as the problems that the parasitic motion piezoelectric positioning platform self-locking performance is poor and the backspacing motion is significant can be solved, and a feasible scheme can be provided for researching a piezoelectric positioning platform simultaneously having a large stroke, high carrying capacity, small backspacing motion and simplicity in structure and control.

Description

technical field [0001] The invention relates to the fields of precision machinery, precision optical systems, micromanipulation, precision / ultra-precision machining, etc., and in particular to a piezoelectric positioning platform and a control method coupled with the principles of bionic and parasitic motion of inchworms. Background technique [0002] Precision positioning platforms designed based on piezoelectric materials have important applications in precision machinery, precision optical systems, micromanipulation, precision / ultra-precision machining and other fields. In order to solve the problem that the output displacement of a single piezoelectric element is very limited, the researchers proposed driving principles such as inchworm bionics, stick-slip inertia, and parasitic motion, and designed and developed a corresponding large-stroke piezoelectric precision positioning platform, which expanded to a certain extent Application range and field of piezoelectric drive...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a piezoelectric positioning platform and control method that couples the principle of bionic and parasitic motion of inchworms. By coupling the respective advantages of the principles of bionic and parasitic motion of inchworms, on the one hand, the piezoelectric element of the bionic piezoelectric positioning platform of inchworms is solved. The problem of multi-use, complex structure and control, on the other hand, solves the problems of poor self-locking performance and significant retraction motion of the parasitic motion piezoelectric positioning platform

Images