Dry vacuum pump set for rotor performance test and rotor performance test method for dry vacuum pump

Abstract

The invention relates to a dry vacuum pump set for rotor performance test and a rotor performance test method for a dry vacuum pump. The dry vacuum pump set comprises a fixed module, outer covers of various specifications, shaft sleeves of various specifications and stators of various specifications; the fixed module includes a driving chamber, a driving shaft and a driven shaft; the stators, shaft sleeves and outer covers are selected according to one or more pairs of engaging rotors releasably mounted on the driving shaft and the driven shaft so that axial positioning structures and drivingchamber on the stators, the shaft sleeves, the outer covers, the driving shaft and the driven shaft form independent pump chambers corresponding to each pair of engaging rotators, and the dry vacuum pump is formed. The test method employs the dry vacuum pump set. Therefore, through quick and simple assembly of different rotor combinations on one dry vacuum pump and formation of a test system, exhaust effects of different rotor combinations in different pressure areas and an optimal scheme are achieved, and the technical problem that sample pumps in development and research stage of dry vacuumpumps experiences unnecessary material and energy waste is solved.

Description

technical field [0001] The invention relates to a dry vacuum pump kit for rotor performance testing and a testing method. Background technique [0002] Due to the rapid development of the semiconductor industry, chemical industry, and thin film industry, the market demand for dry vacuum pumps at home and abroad continues to grow, and the replacement cycle of dry vacuum pump products is gradually shortening. Performance testing for dry vacuum pump products can directly reflect the advantages and disadvantages of the product, and plays a key role in improving the performance of dry vacuum pump products. [0003] Multi-stage dry vacuum pump is currently the most widely used type of dry vacuum pump in the field of dry vacuum pumps, with the most rotor combinations, including multi-stage Roots dry vacuum pumps, multi-stage Roots-claw composite dry vacuum pumps, etc., choose The combined setting of different rotors can increase the pumping speed of the whole pump or increase the ...

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Problems solved by technology

[0006] The purpose of the present invention is to provide a dry vacuum pump kit for rotor performance testing and a dry vacuum pump rotor performance testing method using the dry vacuum pump kit, which can perform performance testing for any combination of rotors and solve the problem of dry vacuum pump product development Technical Problems of Unnecessary Material and Energy Waste in Stage Sample Pumps

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