A dry vacuum pump kit and test method for rotor performance test

Abstract

The invention relates to a dry vacuum pump kit for rotor performance testing and a testing method. The dry vacuum pump kit includes a fixed module, various specifications of outer covers, various specifications of sleeves and various specifications of stators. The fixed module includes a drive chamber, a driving shaft and a driven shaft, and can be detachably installed on the driving shaft and the driven shaft. One or more pairs of meshing rotors on the driven shaft, optional stator, sleeve and outer cover to make the stator, sleeve, outer cover, axial positioning structure on the driving shaft and driven shaft and the drive chamber form a customized structure for each The meshing rotor has an independent pump chamber and integrally forms a dry vacuum pump. The test method applies the dry vacuum pump kit described above. From this, we can explore the pumping effects and optimization solutions of different rotor combinations in different pressure areas by simply and quickly assembling different rotor combinations on a dry vacuum pump to form a test system, which solves the problem of sample dry vacuum pump product development stage. Technical issues of unnecessary material and energy waste in pumps.

Description

technical field [0001] The invention relates to a dry vacuum pump kit for rotor performance testing and a testing method. Background technique [0002] Due to the rapid development of the semiconductor industry, chemical industry, and thin film industry, the market demand for dry vacuum pumps at home and abroad continues to grow, and the replacement cycle of dry vacuum pump products is gradually shortening. Performance testing for dry vacuum pump products can directly reflect the advantages and disadvantages of the product, and plays a key role in improving the performance of dry vacuum pump products. [0003] Multi-stage dry vacuum pump is currently the most widely used type of dry vacuum pump in the field of dry vacuum pumps, with the most rotor combinations, including multi-stage Roots dry vacuum pumps, multi-stage Roots-claw composite dry vacuum pumps, etc., choose The combined setting of different rotors can increase the pumping speed of the whole pump or increase the ...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a dry vacuum pump kit for rotor performance testing and a dry vacuum pump rotor performance testing method using the dry vacuum pump kit, which can perform performance testing for any combination of rotors and solve the problem of dry vacuum pump product development Technical Problems of Unnecessary Material and Energy Waste in Stage Sample Pumps

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