The invention relates to a
vacuum pump testing
system and method. The
vacuum pump testing
system comprises first and second vacuum chambers, first and second pressure testing systems,
gas supply equipment, first and second gas pumping equipment, gas flow testing and controlling equipment and first and second
temperature control equipment, wherein the first and second vacuum chambers are used for being connected with an air suction inlet and an air exhaust outlet of a
pump chamber to be tested correspondingly, the first and second pressure testing systems are used for measuring the pressure ofthe first and second vacuum chambers correspondingly, the
gas supply equipment provides gas for the first and second vacuum chambers, the first and second gas pumping equipment pumps gas from the first and second vacuum chambers correspondingly, the gas flow testing and controlling equipment is used for measuring and controlling the gas flow of the first
vacuum chamber, and the first and second
temperature control equipment controls the temperature of the first and second vacuum chambers correspondingly. The
vacuum pump testing method is applied to the vacuum pump testing
system. The vacuum pump testing system and method can provide pressure, flow and temperature controllable testing environment, can simulate the gas pumping states of a vacuum pump under different conditions, and can be used for testing gas pumping performance of different kinds of vacuum pumps.