System and method for searching defects based on pattern identification

Abstract

The invention discloses a system and a method for searching defects based on pattern identification. The method comprises the following steps of establishing a defect database, calculating each defect pattern in the defect database by a pattern boundary contour algorithm, and respectively and correspondingly establishing contour feature data of each defect; receiving the inputted image of the defect to be found; operating the image of the defect to be found by the pattern boundary contour algorithm to obtain the contour feature data; comparing the extracted contour feature data with the contour feature data established in the defect database; and according to the comparison result, finding the same or similar defect data information from the defect database and the related solutions. The system and the method have the advantages that the defect database can be searched, and the labor, the material and the resource are saved.

Description

technical field [0001] The present invention relates to a defect retrieval system and method based on graphic recognition, in particular to a defect retrieval system and method based on graphic recognition in an integrated circuit manufacturing process. Background technique [0002] With the continuous improvement of integrated circuit technology, the minimum design size is also continuously reduced, and the impact of defects on yield is increasing. more and more complicated. [0003] At present, the most commonly used and most intuitive way of expressing defects is graphics. figure 1 It is a schematic diagram of a defect database commonly used in the prior art. for figure 1 The defect database of the company can only be queried by keywords, so even if the defect database has been established, it is impossible to find relevant information from the database through retrieval, and can only rely on the accumulation of original experience to find problems, and it often takes ...

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Problems solved by technology

for figure 1 The defect database of the company can only be queried by keywords, so even if the defect database has been established, it is impossible to find relevant information from the database through retrieval, and can only rely on the accumulation of original experience to find problems, and it often takes a lot of time to solve a defect problem. a lot of manpower and material resources

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