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Integrated optical waveguide three-dimensional electric field sensor

A technology that integrates optical waveguides and electric field sensors. It is used in electrostatic field measurement and other directions. It can solve the problems of large electric field disturbance, large sensor size, and large measurement error, and achieve the effect of small size, accurate measurement, and small interference.

Active Publication Date: 2018-06-05
KUNMING UNIV OF SCI & TECH
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Problems solved by technology

[0005] However, since the size of the triangular prism of this three-dimensional electric field sensor is on the order of centimeters, the overall size of the sensor is relatively large, and the disturbance to the measured electric field is relatively large. The electric field strength will inevitably cause a large measurement error

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  • Integrated optical waveguide three-dimensional electric field sensor

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Embodiment 1

[0019] Embodiment 1: An integrated optical waveguide three-dimensional electric field sensor, such as image 3 As shown, it consists of an integrated optical waveguide one-dimensional electric field sensor and an integrated optical waveguide two-dimensional electric field sensor fixed together;

[0020] exist x cut y The surface of the lithium niobate wafer 3 adopts the proton exchange method to form an M-Z optical waveguide interferometer with Y-shaped optical waveguides at both ends and two parallel optical waveguides in the middle. Two parallel metal electrodes 6 are fabricated on both sides of one of the straight waveguide arms. And make the metal antenna 5 that is connected with the metal electrode 6, the metal antenna 5 designed and made and the metal electrode 6 are perpendicular to each other, namely constitute image 3 An integrated optical waveguide 1D electric field sensor is shown. exist x cut y Fabricate integrated optical waveguides and electrodes on the sur...

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Abstract

The invention relates to an integrated optical waveguide three-dimensional electric field sensor which belongs to the field of electric field measurement. The integrated optical waveguide three-dimensional electric field sensor comprises the components of an integrated optical waveguide one-dimensional electric field sensor, wherein an optical waveguide with two Y-shaped ends is manufactured on the surface of a lithium niobate wafer by means of a proton exchange method, wherein the middle part is a M-Z optical waveguide interferometer which is composed of parallel optical waveguides, two sidesof a certain straight waveguide arm at the middle part is provided with two metal electrodes which are parallel with the straight waveguide, and a metal dipole antenna which is vertically connected with the metal electrodes is manufactured; and an integrated optical waveguide two-dimensional electric field sensor, wherein a Y-shaped optical waveguide is formed on the surface of the lithium niobate wafer by means of the proton exchange method, two waveguide arms of the Y-shaped optical waveguide have two M-Z optical waveguide structures; a metal electrode and an antenna are manufactured at twosides of the straight waveguide arm of each the two M-Z optical waveguide interferometers, and furthermore the antennae which are manufactured on the two M-Z optical waveguide interferometers are vertical to each other. The integrated optical waveguide three-dimensional electric field sensor has advantages of small size, high spatial resolution and low interference to the measured electric field.

Description

technical field [0001] The invention relates to an integrated optical waveguide three-dimensional electric field sensor, which belongs to the technical field of electric field measurement. Background technique [0002] With the continuous development of national defense, electric power, physical research, etc., the direct measurement of transient strong electric field has become a key scientific problem that needs to be solved urgently. The integrated optical waveguide field sensor based on integrated optical technology has attracted the attention of more and more researchers because of its fast response, wide frequency band, small interference to the measured electric field, and good insulation. Time Domain Measurements of Electric Fields. [0003] However, most of the current research on integrated optical waveguide field sensors focuses on one-dimensional electric field sensors, that is, if the direction of the electric field to be measured is known, the information of t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R29/12
CPCG01R29/12
Inventor 张家洪李英娜万小容赵振刚李川
Owner KUNMING UNIV OF SCI & TECH
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