Integrated optical waveguide three-dimensional electric field sensor
A technology that integrates optical waveguides and electric field sensors. It is used in electrostatic field measurement and other directions. It can solve the problems of large electric field disturbance, large sensor size, and large measurement error, and achieve the effect of small size, accurate measurement, and small interference.
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[0019] Embodiment 1: An integrated optical waveguide three-dimensional electric field sensor, such as image 3 As shown, it consists of an integrated optical waveguide one-dimensional electric field sensor and an integrated optical waveguide two-dimensional electric field sensor fixed together;
[0020] exist x cut y The surface of the lithium niobate wafer 3 adopts the proton exchange method to form an M-Z optical waveguide interferometer with Y-shaped optical waveguides at both ends and two parallel optical waveguides in the middle. Two parallel metal electrodes 6 are fabricated on both sides of one of the straight waveguide arms. And make the metal antenna 5 that is connected with the metal electrode 6, the metal antenna 5 designed and made and the metal electrode 6 are perpendicular to each other, namely constitute image 3 An integrated optical waveguide 1D electric field sensor is shown. exist x cut y Fabricate integrated optical waveguides and electrodes on the sur...
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