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Time-of-flight charged particle spectroscopy

A technology of charged particles and spectroscopy, applied in the field of charged particle microscopy, can solve problems such as rough energy resolution

Active Publication Date: 2018-06-05
FEI CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the small time-of-flight differences between the constituent electrons of the post-sample beam are indistinguishable from each other, making the method suffer from relatively coarse (and so far unacceptable) energy resolution

Method used

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  • Time-of-flight charged particle spectroscopy

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Embodiment 1

[0067] figure 1 is a highly schematic depiction of an embodiment of a CPM M in which embodiments of the present invention are implemented; in this case the CPM is a (S)TEM, but in the context of the present invention it could (as effectively) Examples are ion-based or proton microscopy, or SEM. In this figure, within a vacuum enclosure 2, a continuous electron source 4 (such as, for example, a Schottky emitter) produces a beam (B) of electrons that passes through an electron-optical illuminator 6, which Electron-optical illuminator 6 is used to direct / focus electrons onto selected parts of the sample S (which may eg be (locally) thinned / planarized). This illuminator 6 has an electron optical axis B', and will generally include various electrostatic / magnetic lenses, (scanning) deflector(s) 8, correctors (such as stigmators), etc.; typically , the illuminator 6 may also include a concentrator system (in fact, the entire item 6 is sometimes referred to as a "concentrator system"...

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Abstract

The invention relates to time-of-flight charged particle spectroscopy. An apparatus for performing charged particle spectroscopy, comprising: a source, for producing a pulsed beam of charged particlesthat propagate along a beam path; a specimen holder, for holding a specimen at an irradiation position in said beam path; a detector arrangement, for performing energy-differentiated detection of charged particles that traverse said specimen, wherein, between said source and said detector arrangement, said beam path successively traverses: an energizing cavity, for applying a time-dependent accelerating field to said beam; a primary drift space ; said irradiation position; a time focusing cavity, for converting an energy differential in said beam into a time-of-flight differential; a secondary drift space.

Description

technical field [0001] The invention relates to an apparatus for performing charged particle spectroscopy comprising: [0002] - a source for generating a pulsed beam of charged particles propagating along the beam path; [0003] - a sample holder for holding the sample at the irradiation position in said beam path; [0004] - detector means for performing energy-differentiated detection of charged particles traversing said sample. [0005] The term "traverse" as used herein may refer to transmission (through) the sample or reflection (from) the sample. [0006] The invention also relates to methods of using such devices. [0007] The invention additionally relates to a charged particle microscope comprising such a device therein. Background technique [0008] Charged particle microscopy is a well-known and increasingly important technique for imaging microscopic objects, especially in the form of electron microscopy. The basic class of electron microscopes has historic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J49/40
CPCH01J49/40H01J37/05H01J37/244H01J2237/0437H01J2237/2442H01J2237/24485H01J2237/2449H01J2237/2626H01J37/26H01J2237/2802H01J37/20
Inventor O.J.鲁伊坦P.H.A.穆特萨尔斯J.F.M.范伦斯W.维霍埃文E.R.基伊夫特
Owner FEI CO
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