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A method for improving the centrifugal capacity of the centrifuge in the mortar recovery system

A recovery system and centrifuge technology, applied in the direction of fine working devices, manufacturing tools, stone processing equipment, etc., can solve the problems of the radius wear of the pusher screw blade, the decrease of the mortar cutting ability, and the influence of the centrifugal force of the pusher screw blade, etc. , to achieve the effect of no loss of money, improve centrifugal capacity, and ensure stability

Active Publication Date: 2020-07-03
上海中欣晶圆半导体科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

During the use of the centrifuge, the pusher screw blade (such as figure 1 ) in the process of use, as time goes by, the radius of the pusher screw blade will be gradually worn; the secondary drum (such as figure 1 ) The solid deposited on the wall is getting thicker and thicker, which affects the quality of the mortar; and then affects the surface quality of silicon wafer cutting (such as abnormal line marks on the cutting surface)
[0006] The existing technology does not consider the influence of the wear of the pusher screw blade and the thicker and thicker solid deposited on the drum wall on the centrifugal force
It is common in the industry to reduce the cutting ability of mortar and implement one-time scrapping of the mortar in the entire system every 12 to 16 months; the loss amount is about 50,000 RMB

Method used

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  • A method for improving the centrifugal capacity of the centrifuge in the mortar recovery system
  • A method for improving the centrifugal capacity of the centrifuge in the mortar recovery system
  • A method for improving the centrifugal capacity of the centrifuge in the mortar recovery system

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Embodiment Construction

[0024] The present invention will be further described below in conjunction with the accompanying drawings.

[0025] The invention provides a method for improving the centrifugal capacity of a centrifuge in a mortar recovery system, and the specific steps are as follows:

[0026] Step 1. Stably control the temperature of the space where the mortar recovery system is located, generally controlled at 24-26°C;

[0027] Step 2. Regularly use a density meter to measure the density of the liquid recovered from the centrifuge. If the liquid density is less than the threshold, such as 1.164g / cm 3, , then go to step four; if the liquid density is greater than or equal to the threshold, go to step three;

[0028] Step 3. Reduce the frequency of the pusher screw frequency converter by 1 to 5 Hz;

[0029] Step 4: Repeat step 2 until the liquid density is less than the threshold.

[0030] The method of the present invention is to consider that the solid deposited on the drum wall is get...

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Abstract

The invention provides a method for improving a centrifugal capability of a mortar recycling system centrifuge. Considering that solid precipitated on a drum wall is thicker and thicker and the influence of the effective centrifugal radius on the centrifugal force; by periodically measuring the liquid density after the centrifugation, the liquid density exceeds some data, like 1.164 g / cm<3>, thefrequency of a spiral feed push converter is reduced by a small margin, thus the rotation speed of a spiral fed push blades is reduced by a small margin, accordingly, the speed difference of a drum and feed push spiral blades is increased so that the liquid phase of the high-density solid phase is drained in advance, thus the stability of the cutting quality of the mortar is guaranteed, and no amount of money is lost.

Description

technical field [0001] The invention relates to the field of semiconductor free cutting mortar recovery, and specifically relates to a method for improving the centrifugal capacity of a centrifuge in a mortar recovery system. Background technique [0002] Silicon wafer multi-wire free cutting technology is a common silicon wafer cutting technology at present. Its basic principle is to use a high-speed moving steel wire to drive the mortar attached to the steel wire to rub the silicon rod, so as to achieve the cutting effect. The cutting mortar is mixed with polyethylene glycol and silicon carbide micropowder according to a certain ratio. [0003] During the use of cutting mortar, cutting silicon powder and broken silicon carbide micropowder will be mixed into the mortar at the same time; too much smaller micropowder (usually 1um and below) will affect the cutting ability of the mortar, resulting in abnormal surface condition of the product. The recycling system of cutting m...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B28D5/00
CPCB28D5/007
Inventor 张松江贺贤汉卢运增吉远君
Owner 上海中欣晶圆半导体科技有限公司