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System and method for electrodeless plasma ignition in laser-sustained plasma light source

A technology of plasma and plasma lamps, applied in the field of electrodeless light source, can solve the problems such as the reduction of anti-bursting pressure/intensity of lamps

Active Publication Date: 2018-06-08
KLA CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The need for electrodes also necessitates complex glass-to-metal sealing techniques and a complex bulb form factor that is prone to stress concentrations at the metal-to-glass seal, failure and compromises the lamp's overall crack resistance / strength reduce

Method used

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  • System and method for electrodeless plasma ignition in laser-sustained plasma light source
  • System and method for electrodeless plasma ignition in laser-sustained plasma light source
  • System and method for electrodeless plasma ignition in laser-sustained plasma light source

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Embodiment Construction

[0017] Reference will now be made in detail to the disclosed subject matter which is illustrated in the accompanying drawings. While particular embodiments of the invention have been illustrated, it should be apparent that various modifications and embodiments of the invention can be made by those skilled in the art without departing from the scope and spirit of the foregoing disclosure. Accordingly, the scope of the invention should be limited only by the claims appended hereto.

[0018] general reference Figures 1A to 2C , a system for igniting and sustaining a plasma in a broadband light source is described according to the invention. Embodiments of the present invention are directed to electrodeless plasma lamps for use in LSP broadband sources. Additional embodiments of the invention are directed to simplified plasma lamp geometries and configurations. Such embodiments improve plasma lamp reliability, lifetime (by preventing power consumption due to electrode degradat...

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Abstract

An illumination source for igniting and sustaining a plasma in a plasma lamp of a laser-sustained plasma (LSP) broadband source includes one or more ignition lasers configured to ignite the plasma within a gas contained within the plasma lamp. The illumination sources also includes one or more sustaining lasers configured to sustain the plasma. The illumination sources includes a delivery opticalfiber one or more optical elements configured to selectively optically couple an output of the one or more ignition lasers and an output of the one or more sustaining lasers to the delivery optical fiber.

Description

[0001] Cross References to Related Applications [0002] This application claims under 35 U.S.C. §119(e) that the inventors filed on October 4, 2015 are Anant Chimmalgi, Rudolf Brunner, Anatoli Scheider Anatoly Shchemelinin, Ilya Bezel, Erik Kim, and Rajeev Patil titled Lasers Used on Brightfield Wafer Inspection Tools Priority to U.S. Provisional Patent Application Serial No. 62 / 236,904 for NOVEL LAMP IGNITION SCHEME AND LAMP DESIGN FOR LASER PUMPEDLAMPS USED ON BRIGHTFIELD WAFER INSPECTION TOOLS, said application Incorporated herein by reference in its entirety. technical field [0003] The present invention relates generally to plasma-based light sources, and more particularly to plasma-based electrodeless light sources. Background technique [0004] The need for improved illumination sources for inspecting ever-shrinking semiconductor devices continues to grow. One such illumination source includes a laser-sustained plasma source. Laser-sustained plasma (LSP) source...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J65/04
CPCH01J65/04H01J61/025G02B6/4204H01J61/54H01J65/042H05G2/003H05G2/008
Inventor A·希梅尔吉R·布隆内A·谢梅利宁I·贝泽尔E·基姆R·帕蒂尔
Owner KLA CORP
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