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Method of electrostatic adsorption to a substrate formed with a mos structure

A MOS structure, electrostatic adsorption technology, applied in the direction of circuits, electrical components, electric solid devices, etc., can solve the problems of poor electrostatic adsorption effect, achieve good electrostatic adsorption effect, avoid falling off, and improve the effect of adsorption

Active Publication Date: 2020-09-18
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In order to solve the problem that the above-mentioned electrostatic chuck has poor electrostatic adsorption effect on the substrate formed with the MOS structure, the present invention provides a method for electrostatic adsorption of the substrate formed with the MOS structure

Method used

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  • Method of electrostatic adsorption to a substrate formed with a mos structure
  • Method of electrostatic adsorption to a substrate formed with a mos structure
  • Method of electrostatic adsorption to a substrate formed with a mos structure

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Embodiment Construction

[0025] A method for electrostatic adsorption to a substrate formed with a MOS structure proposed by the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.

[0026] figure 1 It is a schematic flow diagram of the method for electrostatic adsorption to a substrate formed with a MOS structure in Embodiment 1 of the present invention; figure 2 It is a schematic diagram of the structure of the substrate formed with the MOS structure in the method for electrostatic adsorption of the substrate formed with the MOS structure in the first embodiment of the present invention; the following pr...

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Abstract

The invention provides a method for electrostatic adsorption on a substrate with a MOS (metal oxide semiconductor) structure. The method has the advantages that a redundancy conductive layer doped with conductive particles is formed at the back surface of the substrate, and the forming process of the redundancy conductive layer is compatible with an MOS technology, so that the redundancy conductive layer is directly prepared by the MOS forming technology, and the additional technology steps are not needed; the adsorption effect of an electrostatic chuck on the substrate is improved, the falling of the substrate is avoided, and the influence to the preparation process is avoided.

Description

technical field [0001] The invention relates to the field of semiconductor preparation, in particular to an electrostatic adsorption method for a substrate formed with a MOS structure. Background technique [0002] In the semiconductor manufacturing process, electrostatic chucks are usually required to adsorb substrates in various machines. Specifically, there are multiple positive and negative electrode pairs in the electrostatic chuck. By connecting each electrode to a high-voltage DC power supply, polarized charges are generated on the surface of the electrostatic chuck in contact with the substrate, and the polarized charges form an electric field on the surface of the electrostatic chuck. Polarized charges are generated on the back of the substrate in contact with it, and the corresponding free charges are also gathered to the back by the electric field. Under the action of electrostatic attraction generated by opposite charges, the substrate is firmly adsorbed and fixe...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/683H01L23/58
CPCH01L21/6831H01L23/585
Inventor 蒙飞
Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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