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A solidified nanoimprint device

A technology of nano-imprinting and embossing rollers, which is applied in the direction of equipment, photoplate making process of pattern surface, optics, etc., can solve the problems of low efficiency and poor safety, and achieve high operation safety, uniform curing and good curing effect Effect

Active Publication Date: 2020-08-18
NANKAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The curing process is a very critical step in nanoimprint technology. The existing curing method is to heat the substrate only by heating, and then make the nanoimprint glue cure. This method has low efficiency and poor safety.

Method used

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  • A solidified nanoimprint device

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Embodiment Construction

[0019] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0020] Such as figure 1 As shown, the embodiment of the present invention includes an embossing roller 3, a base mounting table 2, and an embossing operation room 1. The top is connected, the base installation table 2 is arranged under the embossing roller 3, and the conveying track 11 for conveying the base plate to the base installation table 2 is arranged in the embossing operation room 1, and the embossing operation room 1 is provided with only The automatic door 5 is only opened when the ultraviolet intensity in the embossing operation room 1 is less than 50W / ㎡, and only one entrance of the automatic door 5 is set on the imprinting operation room 1 .

[0021] The embossing roller 3 includes an inner roller core 3-1 affixed to the rotating shaft 6, and the outer side of the inner roller core 3-1 is connected with a transparent embossing cover 3-2 through...

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Abstract

A curing nanometer imprinting device comprises an imprinting roller, a substrate installation table and an imprinting operation chamber, wherein a rotation shaft of the imprinting roller is in transmission connection with a telescopic device, the telescopic device is connected with the top of the imprinting operation chamber, the substrate installation table is arranged below the imprinting roller, a transmission railway is arranged in the imprinting operation chamber and is used for transmitting a substrate plate to the substrate installation table, an automatic door is arranged on the imprinting operation chamber and is only opened when ultraviolet intensity in the imprinting operation chamber is smaller than 50W / m<2>, and an inlet / outlet of the automatic door is only arranged in the imprinting operation chamber. The curing nanometer imprinting device has the advantages of uniform curing, good curing effect and high operation safety.

Description

technical field [0001] The invention relates to the technical field of nanoimprinting devices, in particular to a curing nanoimprinting device. Background technique [0002] The curing process is a very critical step in nanoimprint technology. The existing curing method is to heat the substrate only by heating, and then make the nanoimprint glue cure. This method has low efficiency and poor safety. Contents of the invention [0003] The object of the present invention is to provide a curing nano-imprinting device. The present invention uses ultraviolet light to cure the imprinting glue on the substrate, thereby improving safety and curing efficiency. [0004] The above-mentioned technical purpose of the present invention is achieved by the following technical solutions: a solidified nano-imprinting device, including an embossing roller, a base mounting table and an embossing operation room, the rotating shaft of the embossing roller and the telescopic device Rotationally ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/00
CPCG03F7/0002
Inventor 徐晓轩王斌梁菁车颖徐阳阳时金蒙文虹镜杨江涛林宝志
Owner NANKAI UNIV