Microelectromechnical piezoelectric ultrasonic transducer with special modal shape

A modal shape, voltage and electricity technology, applied in the direction of fluid using vibration, etc., can solve the problems of low space utilization and low sound pressure

Active Publication Date: 2018-07-24
ZHEJIANG UNIV
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0008] The purpose of the present invention is to solve the problems of low sound pressure and low space utili

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  • Microelectromechnical piezoelectric ultrasonic transducer with special modal shape
  • Microelectromechnical piezoelectric ultrasonic transducer with special modal shape
  • Microelectromechnical piezoelectric ultrasonic transducer with special modal shape

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[0028] The present invention will be further elaborated and illustrated below in conjunction with the drawings and specific embodiments. The technical features of each embodiment of the present invention can be combined accordingly without conflicting each other.

[0029] Such as Figure 1~3 As shown, a micro-electromechanical piezoelectric ultrasonic transducer with a specific modal vibration shape includes a substrate 4, a bottom electrode 3, a piezoelectric layer 2, and an upper electrode 1. A slot-shaped cavity is opened in the middle of the back of the substrate 4 to make the substrate 4 face The elastic structure layer 41 is formed. The trough-shaped cavity is formed by two tangents of four cylindrical cavity units 01 of the same size and height. The center lines of the four cylinders are located at the four corners of the square, and the four cylindrical cavity units 01 are A cylindrical base 4 with an arc-edge rhombus cross-section is sandwiched between, and the cylindr...

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Abstract

The invention discloses a microelectromechnical piezoelectric ultrasonic transducer with a special modal shape. The transducer is provided with a substrate, a structural layer, a bottom electrode, piezoelectric layers and top electrodes. An operating principle of the transducer is to convert mechanical energy to electric energy or the electric energy to the mechanical energy by using direct and inverse piezoelectric effects. According to the transducer, the special modal shape is achieved by achieving a special vibrational structure on the structural layer, and the shape has higher emission sound pressure and higher space utilization efficiency.

Description

technical field [0001] The invention belongs to the field of transducers in the technical field of microelectromechanical systems (MEMS), in particular to a high-efficiency piezoelectric ultrasonic transducer with a specific mode shape. Background technique [0002] Piezoelectric ultrasonic transducer is a device that can convert electrical energy into mechanical energy and convert mechanical energy into electrical energy, which integrates sending and receiving ultrasonic waves. The traditional ultrasonic transducer is machined, which has large volume, high power consumption, and is not conducive to integration, and because its acoustic impedance does not match the traditional acoustic transmission medium (air, water), its acoustic emission efficiency is low. The micro-electro-mechanical ultrasonic transducer processed by the micro-manufacturing process combined with micro-electro-mechanical system technology effectively overcomes the above-mentioned shortcomings. Microelec...

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Application Information

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IPC IPC(8): B06B1/06
CPCB06B1/06
Inventor 谢金刘鑫鑫陈旭颖陈冬阳
Owner ZHEJIANG UNIV
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