Air flotation precision motion platform

Abstract

The invention discloses an air flotation precision motion platform. A vacuum adsorption platform is installed on a motion rail of a base, the vacuum adsorption platform is fixedly connected with a linear motor through a first transition plate, the linear motor is installed on the base, a built-in vacuum generator is arranged in the vacuum adsorption platform, air flotation bearings are inlaid at the bottom and on the two sides of the vacuum adsorption platform, and an external vacuum generator is detachably connected with the vacuum adsorption platform. A first air channel and a second air channel are arranged in the vacuum adsorption platform, the first air channel communicates with the built-in vacuum generator and used for adsorbing workpieces, and the second air channel communicates with the external vacuum generator and the air flotation bearings and used for generating an air film between the vacuum adsorption platform and the base. The technical problem that the positioning andmotion accuracy of an existing ultraprecise grinding tool are easily reduced due to friction and thermal deformation existing between a mechanical guide rail and a platform, as a result the machiningprecision of a workpiece is affected is solved.

Description

technical field [0001] The invention relates to the technical field of workpiece processing mechanisms, in particular to an air-floating precision motion platform. Background technique [0002] With the implementation of my country's precision and ultra-precision machining development strategy and after years of hard work, no matter it is precision machine tools, diamond tools, or precision machining processes, a complete set of precision manufacturing technology systems have been formed to promote machinery manufacturing to a higher level. High-level development has laid the foundation. With the rapid development of science and technology and increasingly fierce market competition, more and more manufacturing industries have begun to invest a lot of human, financial and material resources in the research and implementation of advanced manufacturing technology and advanced manufacturing models. [0003] A grinder is a machine tool that uses abrasive tools to grind the surfac...

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Problems solved by technology

[0005] The invention provides an air-floating precision motion platform, which is used to solve the problem that the existing ultra-precision grinding machine tools are easy to reduce the positioning and motion accuracy due to the friction and thermal deformation between the mechanical guide rail and the platform, thereby affecting the machining accuracy of the workpiece. technical problem

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