Pressurizing device and operating method of sorter for semiconductor element testing
A technology for component testing and pressurizing devices, applied in the field of pressurizing devices, can solve problems such as device reliability deviation, and achieve the effects of preventing bad operation, saving resources and time, and ensuring operational reliability.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0054] Preferred embodiments according to the present invention will be described with reference to the drawings, and repeated descriptions and descriptions of substantially the same configurations will be omitted or reduced as much as possible for the sake of brevity.
[0055]
[0056] figure 2 It is a schematic plan view of a sorter HR to which a pressurizing device 200 (hereinafter, simply referred to as "pressurizing device") of a sorter for semiconductor device testing according to the present invention can be applied.
[0057] The sorting machine HR includes a loading device LA, a soaking chamber SC, a testing chamber TC, a pressurizing device 200, a cooling chamber DC, an unloading device UA and a controller CA.
[0058] The loading device LA will be carried on the customer pallet CT 1 The semiconductor components to be tested are loaded onto the test tray TT at the loading position LP.
[0059] The soaking chamber SC is configured to apply a thermal stimulus to t...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 


