Control system and control method for rotary positioning platform under microscope

Abstract

The invention discloses a control system and a control method of a rotary positioning platform under a microscope. The system includes: a rotary console, first and second translation consoles, a sample stage, a visual feedback subsystem, a driver, and a double closed-loop positioning Control system, the movement directions of the first and second translation consoles are perpendicular to the rotation axis of the rotary console; the double closed-loop positioning control system includes: the external position controller calculates the input displacement of the inner ring; the first and second translation control The displacement closed-loop control subsystem of the table includes: the plug-in repetitive controller calculates the displacement compensation control quantity according to the error between the input displacement and the feedback displacement; the original closed-loop displacement control subsystem calculates the displacement control quantity according to the error between the input displacement and the feedback displacement , and combined with the displacement compensation control amount to control the driver to drive the displacement of the first and second translation consoles. Improve the rotational positioning accuracy of micro-nano-scale samples under the microscope, and greatly improve the microscopic imaging effect of the sample.

Description

technical field [0001] Embodiments of the present invention relate to microscope technology, and in particular to a control system and method for a rotary positioning platform under a microscope. Background technique [0002] With the rapid development of micro-nano technology, the sample positioning technology at the microscopic scale, as one of the key technologies for precise imaging under the microscope and in situ precise characterization, has attracted more and more attention. Different from the macroscopic scale at the microscopic scale, samples in the microscope environment face some unique challenges, including narrow working space, limited observation field, and few sensing methods and unknown depth information. Therefore, the demand for high-precision positioning at the micro-nano scale has brought new requirements to traditional micro-nano operating systems and technologies. [0003] At present, most micro-nano manipulators can only observe linearly moving sampl...

AI Technical Summary

Problems solved by technology

Compared with linear positioning, rotational positioning has very strict requirements on the micro-nano operating system, because if the sample has a small amount of eccentricity, a small rotation angle may cause a large displacement change of the sample under the microscope

It is very difficult to fit the sample at the absolute center of rotation in real practice

In addition, even small natural vibrations of the micro-nano robot operating platform will lead to obvious radial displacement fluctuations of the sample at the micro-nano scale

Therefore, for the rotating micro-nano operating platform, the radial fluctuation of the sample always exists when the sample is rotated under the microscope. The fluctuation characteristics of these samples will inevitably bring about image blurring, deformation, and even make the sample move out of the observation field of the microscope, resulting in sample imaging. and the failure of the operation

Therefore, the high-precision positioning of the rotating sample is still the bottleneck of highly flexible micro-nano manipulation in the microscope environment.

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