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Control gate line stripping defect detection method

A technology for controlling grid and peeling defects, applied in semiconductor/solid-state device testing/measurement, electrical components, circuits, etc., can solve problems such as difficult detection control grid lines, and achieve the effect of automatic detection

Active Publication Date: 2018-09-21
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a detection method for the peeling defect of the semi-control grid line, which solves the problem that it is difficult to detect the control grid line in real time in the prior art

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  • Control gate line stripping defect detection method
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Embodiment Construction

[0034] The detection method for the peeling defect of the control gate line of the present invention will be described in more detail below in conjunction with the schematic diagram, wherein a preferred embodiment of the present invention is shown, it should be understood that those skilled in the art can modify the present invention described here, and still realize Advantageous effects of the present invention. Therefore, the following description should be understood as the broad knowledge of those skilled in the art, but not as a limitation of the present invention.

[0035] In the interest of clarity, not all features of an actual implementation are described. In the following description, well-known functions and constructions are not described in detail since they would obscure the invention with unnecessary detail. It should be appreciated that in the development of any actual embodiment, numerous implementation details must be worked out to achieve the developer's sp...

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Abstract

The invention provides a control gate line stripping defect detection method comprising the steps that the photoresist of the control gate line is formed and then the photoresist is exposed; the imageof the device is acquired and the optical signal of the device is detected; and the difference value of the optical signal of the local area of the control gate line is detected, and the control gateline has the stripping defect when the difference value is less than a threshold. According to the control gate line stripping defect detection method, the photoetching machine is exposed and then the optical signal of the device is detected so that automatic detection of the stripping defect can be realized.

Description

technical field [0001] The invention relates to the technical field of semiconductor integrated circuits, in particular to a method for detecting peeling defects of control grid lines. Background technique [0002] In the current semiconductor industry, integrated circuit products can be mainly divided into three types: analog circuits, digital circuits and digital / analog hybrid circuits, among which storage devices are an important type of digital circuits. Among storage devices, the development of flash memory (flash memory for short) is particularly rapid in recent years. The main feature of flash memory is that it can keep stored information for a long time without power on; and it has the advantages of high integration, fast access speed, easy erasing and rewriting, etc., so it has been widely used in many fields such as microcomputer and automatic control. a wide range of applications. [0003] Generally speaking, flash memory is a split gate decoupling strand or a s...

Claims

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Application Information

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IPC IPC(8): H01L21/66
CPCH01L22/12
Inventor 曹子贵
Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP