A preparation method of bismuth strontium calcium copper oxygen high temperature superconducting thin film fine pattern
A high-temperature superconducting thin film, bismuth strontium calcium copper oxide technology, applied in the usage of superconducting elements, equipment for manufacturing conductive/semiconducting layers, superconducting devices, etc. It is difficult to obtain graphics and other problems, so as to achieve the effect of regular and neat edges of fine graphics and avoid damage to film morphology and performance
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[0036] The invention provides a method for preparing bismuth strontium calcium copper oxygen high temperature superconducting thin film fine pattern, such as Figure 1-2 shown, including the following steps:
[0037] Step 1: Prepare Bi-2212 photosensitive sol with bismuth acetate, strontium acetate, calcium acetate and copper acetate as raw materials, acrylic acid as chemical modifier, and methanol as solvent;
[0038] The specific implementation method of step 1 is as follows:
[0039] Step 1.1, preparation of bismuth solution: mixing and stirring bismuth acetate:acrylic acid:methanol=1:(10-30):(20-40) molar ratio to obtain bismuth solution, metal bismuth and acrylic acid form a coordination compound in the solution;
[0040] Step 1.2, preparation of the strontium solution: mixing and stirring the molar ratio of strontium acetate:acrylic acid:methanol=1:(10-40):(20-40) to obtain the strontium solution;
[0041] Step 1.3, preparation of the calcium solution: mixing and stirr...
Embodiment 1
[0058] Under room temperature conditions, preparation takes bismuth acetate, strontium acetate, calcium acetate and copper acetate as raw material, acrylic acid is chemical modifier, and methanol is the Bi-2212 photosensitive sol of solvent, and specific implementation method is as follows,
[0059] (1) Preparation of bismuth solution: mix and stir with bismuth acetate: acrylic acid: methanol = 1: (10-30): (20-40) molar ratio to obtain bismuth solution, metal bismuth and acrylic acid form a coordination compound in the solution;
[0060] (2), the preparation of strontium solution: mix and stir with strontium acetate: acrylic acid: methanol=1: (10~40): (20~40) molar ratio obtains strontium solution;
[0061] (3), the preparation of calcium solution: mix and stir with calcium acetate: acrylic acid: methyl alcohol=1: (10~20): (10~30) molar ratio obtains calcium solution;
[0062] (4), the preparation of copper solution: with copper acetate: acrylic acid: methanol = 1: (3 ~ 10): (...
Embodiment 2
[0066] The preparation of Bi-2212 photosensitive sol is the same as in Example 1.
[0067] Using Bi-2212 photosensitive sol, Bi-2212 gel film was prepared on LAO(001) single crystal substrate by dipping and pulling method at room temperature. The Bi-2212 gel film was placed in an oven, dried at 90°C for 2 minutes, then irradiated with ultraviolet light for 20 minutes through a mask with a specific shape, and dissolved in a mixed solvent of methanol and isopropanol with a volume ratio of 8:2. Wash to get the fine pattern of Bi-2212 gel film. The prepared patterned Bi-2212 gel film was put into a tube furnace, and the temperature was raised to 400°C at a rate of 3°C / min in a high-purity nitrogen atmosphere. Subsequently, in a mixed atmosphere of water vapor with a volume ratio of 1-10% and the balance of high-purity oxygen, the temperature is raised to 550°C at a rate of 5°C / min and kept at a temperature of 40min. Finally, in a mixed atmosphere of high-purity oxygen with a vol...
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