Separation device
A technology for separating devices and substrates, applied in nonlinear optics, instruments, optics, etc., can solve problems such as warpage and weight, thin substrates, flexible substrates, large damage, abnormal substrate quality, etc.
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[0018] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.
[0019] see figure 1 The separation device 100 shown is used for tearing off the poorly attached structural layer 210 on the substrate 200 from the substrate 200 . The separating device of the present application includes a base 10 , a motor 20 , a rail 30 , a grasping part 40 , a liquid spraying part 50 and an air spraying part 60 . The substrate 200 is placed on the base 10 , and the upper surface of the base 10 is provided with an adsorption un...
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