Pressure sensor
A pressure-sensitive sensor and piezoresistor technology, applied in instruments, force/torque/power measuring instruments, measuring devices, etc., can solve the problem of different resistances, different conduction path lengths of electrode wiring, and different resistance detection values And other issues
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[0085] (1) Overall structure of the sensor device
[0086] use figure 1 The sensor device 1 including the pressure sensitive sensor 3 will be described. figure 1 is a schematic diagram showing the structure of the pressure-sensitive sensor according to the present invention. in addition, figure 1 The cross-sectional diagrams always only show the approximate positional relationship between the layers, and do not strictly reproduce the actual structure.
[0087] The sensor device 1 is a device for detecting pressing force. The sensor device 1 has a pressure-sensitive sensor 3 . The pressure-sensitive sensor 3 is a sensor that detects a change in resistance when a pressing force is applied.
[0088] The pressure sensitive sensor 3 mainly has an upper layer 9 , a lower layer 11 and an intermediate adhesive layer 13 .
[0089] The upper layer 9 has an upper film 15 (an example of a first insulating base material) and a pressure-sensitive layer 17 (an example of a pressure-...
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Abstract
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