Horizontal type movable cathode coating machine

Abstract

The invention discloses a horizontal type movable cathode coating machine. The horizontal type movable cathode coating machine comprises a mounting frame, a vacuum cavity, a reciprocating motion mechanism, a linear cathode source, a weak current access port, a filtering and inflating device, a flap valve, a coarse pumping mechanical pump, a front-stage mechanical pump, a molecular pump, a gate valve, a tray feeding table, a feeding motor and a tray; and the vacuum cavity is formed in one side of the interior of the mounting frame. According to the horizontal type movable cathode coating machine, the pilot scale production process of metal terbium, dysprosium and aluminum coated film on the surface of flaky and columnar neodymium iron boron ceramic is realized, and the coating machine can also be used for surface modification coating of various materials; through the pilot scale production of the neodymium iron boron ceramic sheet and the ceramic column magnetron sputtering metallized film, the capacity in each day can also reach 10-50 kilograms; the machine is especially suitable for surface coating of the metallization function film of the neodymium iron boron magnetic ceramic sheet and the ceramic column, for example, the surface modification coating of the sputtering terbium, dysprosium and aluminum; and a full-automatic design is adopted for the production line, the production efficiency is high, the cleanliness is high, and the reliability is good.

Description

technical field [0001] The invention relates to the technical field of coating machines, in particular to a horizontal mobile cathode coating machine. Background technique [0002] Sputtering targets of precious metals and their alloys manufactured by refining, melting forging, calendering or powder metallurgy are widely used in semiconductor devices, display devices, recording media, magnetically modified materials, and wave absorption modification. [0003] With the rapid development of the hybrid electric vehicle (HEV) industry, NdFeB magnets for automobiles are required to have high coercive force and be able to serve at high temperatures. It is common knowledge in the industry that the replacement of Nd in the Nd2Te14B grains of sintered NdFeB by heavy metal rare elements such as dysprosium / terbium (Dy / Tb) will increase the anisotropy field of the main phase crystal, which will greatly increase the coercive force of the magnet. increase, but heavy rare earth resources ...

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Problems solved by technology

[0005] In the production process, because the production line is designed for mass production, it is impossible to complete the process trial of new products, or the cost of process debugging with a continuous coating line is very high. Therefore, it is necessary to design a horizontal mobile cathode coating machine. very necessary

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