An upper lamp box of a macroscopic inspection machine

A macro inspection and light box technology, applied in optics, instruments, photography, etc., can solve the problems of waiting time, lighting time, long lighting and extinguishing interval, low macro detection efficiency, etc., and achieve real-time use, real-time switching, The effect of improving efficiency

Pending Publication Date: 2018-12-28
SUZHOU JINGLAI OPTO CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Because the sodium light tube has the characteristics of a light-on time and a long time between light-on and extinguish, the existing upper light box

Method used

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  • An upper lamp box of a macroscopic inspection machine
  • An upper lamp box of a macroscopic inspection machine
  • An upper lamp box of a macroscopic inspection machine

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[0029] The technical solutions of the present invention will be further described below in conjunction with the drawings and specific implementations.

[0030] Such as figure 1 As shown, the upper light box of the macro inspection machine of the present invention includes a light box base 100 and a light box body 200.

[0031] Such as Figure 1 to Figure 4 As shown, the light box main body 200 includes a moving frame 201, a metal lamp assembly, a sodium lamp group 205, and a driving mechanism 207. Among them, the mobile frame 201 is slidably connected to the light box base 100; the metal lamp assembly includes a metal lamp fixing base 202 fixed on the moving frame 201, a metal lamp 203 installed on the metal lamp fixing base 202, and a metal lamp 203 arranged on the moving frame 201 and located The optical glass 204 where the light of the metal lamp 203 is focused is used to converge or diffuse the tube of the metal lamp 203; the sodium lamp group 205 is arranged on the moving fra...

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Abstract

The invention relates to the technical field of a lamp box structure, and discloses an upper lamp box of a macroscopic inspection machine, the box comprising a lamp box base and a lamp box main body,wherein, the lamp box main body comprises: a moving frame slidably connected with the lamp box base; a metal lamp assembly which includes a metal lamp fixing seat fixed on a moving frame, a metal lampmounted on the metal lamp fixing seat, and an optical glass disposed on the moving frame and positioned at a light focus of the metal lamp; a sodium lamp group arranged on the moving frame and offsetfrom the metal lamp, the sodium lamp group comprising at least two sodium lamp boxes, each sodium lamp box comprising an open type lamp box, a light shield assembly rotatably arranged on the lamp boxand capable of closing or opening an open opening of the lamp box, and a sodium lamp arranged in the lamp box; a drive mechanism provided on the moving frame to drive each of the shield assemblies torotate. The upper lamp box of the macroscopic inspection machine of the invention can switch the lamps of the sodium lamps and the metal lamp in real time.

Description

technical field [0001] The invention relates to the technical field of light box structures, in particular to an upper light box of a macro inspection machine. Background technique [0002] In the manufacturing process of substrates such as photomasks and display panels, it is usually necessary to place them on macroscopic inspection equipment for macroscopic inspection to check whether there are defects on the panel or substrate. [0003] The macro-inspection equipment is usually placed in a light-shielding outer cover, and a light box and a back light box are installed on the outer cover to provide light for the macro-inspection equipment, which is convenient for the automatic optical device to take pictures. [0004] At present, the upper light box is installed on the top of the outer cover, and the upper light box uses metal light and sodium light alternately to illuminate the macroscopic inspection equipment. Because the sodium light tube has the characteristics of a l...

Claims

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Application Information

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IPC IPC(8): G03B15/02
CPCG03B15/02
Inventor 王文朱涛
Owner SUZHOU JINGLAI OPTO CO LTD
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