A method of manufacturing a planar coil

Abstract

The invention discloses a method for manufacturing a planar coil, which comprises the following steps: coating a first insulating layer (2) on a base (1), plating a metal layer on the surface, and etching a metal coil (3) and a metal coil (3) from the metal layer. Pad (4) structure, coating the second insulating layer (2) again and making a via hole (5), the surface is plated with a metal layer, the metal layer is etched again to form a metal coil (3) structure, repeat the above second The step of coating the insulating layer (2), making the via hole (5), plating the metal layer and etching the structure of the metal coil (3), until the required number of turns of the coil is produced, so as to realize the production of the planar coil. The manufacturing method of the planar coil of the present invention directly integrates the coil on the base material, which can realize high-performance thermal stress matching of the material and improve the performance of the device. In addition, the present invention has a simple process, can be produced in batches, and has strong process consistency. No complicated assembly process is required.

Description

technical field [0001] The invention belongs to the technical field of electromechanical technology, and the method relates to a manufacturing method of a planar coil. Background technique [0002] Metal coils are common wire groups in the electromechanical field, and they are used in a wide range of fields. Traditional coils are generally wound by wires one by one, and the wires are insulated from each other. In accelerometers and micro-motors, it can be used for torquer excitation rings and micro-stator coils. The coils in traditional torquers and motors require assembly process integration. The deformation of the coils due to environmental influences is directly transmitted to the key structure of the device, resulting in errors. [0003] In recent years, various planar coils have been derived to replace traditional wound coils. There are two mainstream methods for the production of these planar coils. One is to manufacture high-aspect-ratio microstructure coils based on ...

AI Technical Summary

Problems solved by technology

In accelerometers and micro-motors, it can be used for torquer excitation rings and micro-stator coils. The coils in traditional torquers and motors require assembly process integration, and the deformation of the coils due to environmental influences is directly transmitted to the key structure of the device, resulting in errors.

[0003] In recent years, various planar coils have been derived to replace traditional wound coils. There are two mainstream methods for the production of these planar coils. One is to manufacture high-aspect-ratio microstructure coils based on the micro-electromechanical system (MEMS) process, mainly through the quasi-LIGA process. , polymer or SU8 process, etc., but these processes are more complicated, and the cost is high, the yield is low and only single-layer coils can be made; the second is based on the printed circuit board (PCB) process to make winding coils, although the process is simple and the cost is low , but the height-to-width ratio of the coil is limited, it is difficult to make the wire hole connecting the front and back coils, and the position accuracy is difficult to guarantee

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