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A set of molecular pump blades

A molecular pump and molecular technology, applied in the direction of pumps, pump components, non-variable-capacity pumps, etc., can solve the problems of low structural strength, broken pump accidents, easy deformation, etc.

Active Publication Date: 2021-05-28
杨建康
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Existing large-diameter molecular pumps have a diameter of up to 400 mm, long blades, low structural strength, and easy deformation that may cause broken pump accidents

Method used

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  • A set of molecular pump blades
  • A set of molecular pump blades
  • A set of molecular pump blades

Examples

Experimental program
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Effect test

Embodiment Construction

[0007] The dynamic and static disks move relative to each other within a distance of less than one millimeter, and the speed is as high as tens of thousands of revolutions. The air molecules sandwiched between the moving and static disks collide and rub against the surface of the moving and static disks, and the leaf disks transmit their kinetic energy to the air molecules. The air molecules that have received kinetic energy scatter outward, and the gas pressure between the moving and static disks becomes lower. The gas pressure in the space on the upper surface of the moving disk is higher than the gas pressure between the moving disk and the static disk, and the gas in the space above the moving disk will move downward through the through holes on the surface of the moving disk. In this way, the extracted gas movement route is sucked from the vacuum chamber to the upper surface of the moving plate, and then passes through the through hole on the moving plate into the gap bet...

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Abstract

Name of the invention: A set of molecular pump leaf discs Technical field: The present invention is a design method of vacuum pump blades. The blades of traditional molecular pumps are similar to the blades of electric fans. The longer the blades are, the better the air exhaust effect will be. At the same time, the strength of the blades will become weaker and they will easily break. The present invention replaces the blades with the moving disk with holes and the static disk with grooves dug. This design reduces the processing cost, reduces the thermal deformation of the blade, strengthens the structural strength, and improves the air extraction effect. Technical problem to be solved: design problem of ultra-large-diameter molecular pump Technical points and application: There are requirements on the size, quantity and position of the holes on the moving plate and the grooves on the static plate. Only when the dynamic and static discs are used together can the vacuum pumping effect be exerted. Relying on this design, a molecular pump with larger diameter and higher pumping speed can be manufactured.

Description

technical field [0001] The invention is a design method of a vacuum pump vane. The blades of traditional molecular pumps are similar to the blades of electric fans. The longer the blades are, the better the air exhaust effect will be. At the same time, the strength of the blades will become weaker and they will easily break. The present invention replaces the blades with the moving disk with holes and the static disk with grooves dug. This design reduces the processing cost, reduces the thermal deformation of the blade, strengthens the structural strength, and improves the air extraction effect. Background technique [0002] The size of the vacuum coating machine is getting bigger and bigger, and the turbomolecular pump for pumping air to the vacuum coating machine is also getting bigger and bigger. The existing large-diameter molecular pumps have a diameter of up to 400 mm, long blades, low structural strength, and easy deformation that may cause broken pump accidents. I...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04D29/28
CPCF04D29/28
Inventor 杨建康
Owner 杨建康