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Apparatus and method for transferring carrier

A technology of transmission equipment and carrier, which is applied in the direction of transportation and packaging, conveyor objects, semiconductor/solid-state device manufacturing, etc. It can solve the problems of reducing the loading efficiency of buffer units and achieve the effect of fast loading

Pending Publication Date: 2019-03-05
SEMES CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the loading efficiency of the buffer unit may be reduced

Method used

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  • Apparatus and method for transferring carrier
  • Apparatus and method for transferring carrier
  • Apparatus and method for transferring carrier

Examples

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Embodiment Construction

[0024] While various embodiments are susceptible to various modifications and alternative forms, specific details thereof have been shown by way of example in the drawings and will be described in more detail. It should be understood, however, that the intention is not to limit the invention as claimed to the particular embodiments described. On the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the subject matter as defined by the claims.

[0025] Hereinafter, specific embodiments regarding the raceway device will be described in more detail with reference to the accompanying drawings. However, this invention may be embodied in different forms and should not be construed as limited to only the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the scope of the invention to those skilled in the art. Like re...

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Abstract

An apparatus for transferring a carrier includes a carrying tool including a traveling section that travels along a traveling rail provided on a ceiling of a semiconductor manufacturing line, and a transport section that is coupled to the traveling section to grasp the carrier so as to be removable and horizontally move, and a buffer unit provided adjacent to the running rail, wherein the buffer unit has a plurality of slots in which the carrier transported by the vehicle is loaded. The transport section may rotate the carrier so as to be perpendicular to the traveling direction of the vehicleand load the carriers in the slots.

Description

Background technique [0001] The present invention relates to a carrier transfer device and a method of transferring carriers, and more particularly to a carrier transfer device and a method of transferring carriers in a semiconductor manufacturing line. [0002] In general, semiconductor processing equipment for manufacturing semiconductor devices is sequentially arranged to perform various processes on objects such as semiconductor substrates. The object may be supplied to each semiconductor processing apparatus in a state of being loaded on a carrier or may be retrieved from each semiconductor processing apparatus using the carrier. [0003] Carriers are transported by vehicles. The carrier transfers the carrier loaded with the object thereon to at least one load port installed in the semiconductor processing apparatus, and picks up the carrier loaded with the object from the load port and transfers the carrier to the outside. [0004] While a carrier is on the loadport, t...

Claims

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Application Information

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IPC IPC(8): H01L21/677
CPCH01L21/6773H01L21/67706H01L21/67778
Inventor 李尚熙
Owner SEMES CO LTD
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