Evaporation carrier plate and method for utilizing evaporation carrier plate for conducting evaporation on base plate
A carrier plate and vapor deposition technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problem of uneven display of display devices, improve product darkening phenomenon, and reduce the probability of sticking , Improve the effect of uneven fit
Active Publication Date: 2019-03-12
WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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Problems solved by technology
[0003] The technical problem to be solved by the present invention is to provide an evaporation carrier and a method for evaporating a substrate by using the evaporation carrier. Through the structure that the protrusion is separated from the carrier body, according to the actual situation of evaporation, it is convenient to Replace the corresponding protrusion with the corresponding position of the substrate to improve the phenomenon of substrate sticking and uneven display of the display device
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[0028] The following description of the embodiments refers to the accompanying drawings to illustrate specific embodiments in which the invention may be practiced. The directional terms mentioned in the present invention, such as "up", "down", "front", "back", "left", "right", "top", "bottom", etc., are only for reference to the attached drawings. direction. Therefore, the directional terms used are used to illustrate and understand the present invention, but not to limit the present invention.
[0029] Such as figure 1 As shown, in one embodiment, the evaporation carrier 100 of the present invention includes a carrier body 110 and several protrusions 120 .
[0030] The carrier body 110 can be a rectangular metal plate whose size is designed according to the size of the substrate 200 to accommodate the substrate 200 (see image 3 ). The carrier body 110 has a loading surface 112 for loading the substrate 200 .
[0031] Such as image 3 As shown, the substrate 200 is gene...
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Abstract
The invention discloses an evaporation carrier plate and a method for utilizing the evaporation carrier plate for conducting evaporation on a base plate. The evaporation carrier plate comprises a carrier plate body and multiple protrusions. The carrier plate body is provided with a loading face which is used for loading the base plate. The base plate comprises a side portion, a transition area anda display area. The multiple protrusions are detachably fixed to the loading face of the carrier plate body. The protrusions include the first protrusions and the second protrusions, wherein at leastone first protrusion corresponds to the transition area, and the second protrusions correspond to the display area. By means of the evaporation carrier plate, in order to avoid the risk in the evaporation process, the carrier plate body and the protrusions are in separately combined design, the piece sticking probability is effectively lowered, and the piece breaking risk is lowered; and meanwhile, the problem of uneven attaching between the base plate and a metal mask plate due to bending and deforming of the base plate is solved, and therefore the phenomenon that part of products are tarnished due to coating deflection is avoided.
Description
technical field [0001] The invention relates to the technical field of evaporation equipment and OLED substrate manufacturing, in particular to an evaporation carrier and a method for evaporating a substrate by using the evaporation carrier. Background technique [0002] With the development of technology, the size of the substrate of the OLED display device is getting larger and larger. During the evaporation process of the substrate, since the size of the substrate is too large, the curvature of the substrate will also increase after the substrate is bonded to the touch plate. Therefore, the risk of fragmentation is greatly increased. OLED products Among them, the proportion of defects showing unevenness will also increase significantly. However, in the existing vapor deposition carrier (Touch Plate), the bumps are integrally designed with the carrier body, so the position and size of the bumps cannot be adjusted according to the actual situation. For example, when the a...
Claims
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IPC IPC(8): C23C14/50C23C14/24H10K99/00
CPCC23C14/24C23C14/50C23C14/12C23C14/042H10K71/164
Inventor 刘志乔
Owner WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD