Ion source support table

Abstract

To enable an ion source 101 mounted on an ion source support base X to assume a lain posture in a stable condition.SOLUTION: There is provided an ion source support base X on which an ion source 101 comprising a long-shaped plasma generation container 10 and a pair of rollers 31 provided in side walls 11b of the plasma generation container 10 are mounted, the side walls 11b being opposite to a direction orthogonal to a longitudinal direction in the long-shaped plasma generation container 10. The ion source support base X comprises: a pair of rails 5 on which the pair of rollers 31 is mounted rollably while the ion source 101 is suspended; and a dragging mechanism 6 that drags the ion source 101 from one end side A of a rail 5 to the other end side B while the pair of rollers 31 is mounted on the pair of rails 5.SELECTED DRAWING: Figure 3

Description

technical field [0001] The present invention relates to an ion source support table for supporting an ion source. Background technique [0002] As disclosed in Patent Document 1, as a conventional ion source support stand, there is an ion source support stand for placing and transporting an ion source removed from an apparatus main body such as an ion beam irradiation apparatus. The aforementioned Patent Document 1 describes that in order to transport an ion source having a large height in a stable state, the ion source in a standing posture is laid down, and the ion source is supported in a fallen posture with a reduced height. [0003] Specifically, the ion source includes a pair of rollers provided so as to sandwich the ion extraction port, and a pair of rails on which the pair of rollers are rotatably placed is provided on the ion source support table. [0004] In addition, when the ion source is removed from the main body of the apparatus, the ion source is tilted forw...

AI Technical Summary

Problems solved by technology

[0005] However, as mentioned above, if you want to place the rollers on the rails while keeping the ion source suspended, for example, there may be the following problems: the ion source shakes and becomes unstable, causing the rollers and the rails to become unstable. position deviation

If the rollers are placed on the rails in a state where the positions have been shifted, the following problems may occur: the rollers will come off the rails, the ion source will fall from the ion source support table, the ion source and the ion source support table will be damaged, Man-made disasters occur around the ion source support table

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