Surface-enhanced Raman substrate with three-dimensional multilayered structure and preparation method thereof

A technology of structured surface and Raman substrate, applied in the field of molecular recognition, to achieve the effect of rich structure and good controllability

Active Publication Date: 2019-04-12
BEIHUA UNIV
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  • Claims
  • Application Information

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Problems solved by technology

In addition, based on the research on SERS, people mainly focus on the surface plasmon resonance embodied by a single noble metal structure, but there are few studies on the surface plasmon resonance of the semiconductor-based metal composite structure system, although there are also studies on the metal-semiconductor. Composite structures are used as SERS substrates, but there are few reports on the composite structures of semiconductor + metal nanoparticles + dielectric layer + metal nanoparticles as SERS substrates.

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  • Surface-enhanced Raman substrate with three-dimensional multilayered structure and preparation method thereof
  • Surface-enhanced Raman substrate with three-dimensional multilayered structure and preparation method thereof
  • Surface-enhanced Raman substrate with three-dimensional multilayered structure and preparation method thereof

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preparation example Construction

[0055] The present invention also provides a method for preparing a surface-enhanced Raman substrate with a three-dimensional multilayer structure, comprising the following steps:

[0056] Step 1, growing the ZnO seed layer:

[0057] The substrate was ultrasonically cleaned by acetone, ethanol, and deionized water for 10 minutes, and a ZnO seed layer was grown on the surface of the substrate by magnetron sputtering. The radio frequency power was 80W, the flow rate of argon gas was 40 sccm, and the growth time was 10 minutes;

[0058] Step 2, preparing ZnO nanorod arrays:

[0059] Zn(NO 3 ) 2 ·6H 2 O solution and C 6 h 12 N 4 The solutions are mixed, and the mixed solution is placed in a reaction kettle, and then the substrate for growing the ZnO seed layer is placed in the reaction kettle for reaction. The reaction temperature is 95° C. and the time is 3 hours. After the reaction is completed, the substrate is taken out. Wash it with deionized water and dry it to get a ...

Embodiment 1

[0070] 1. Grow ZnO seed layer: 1*1cm 2 The ITO substrate was ultrasonically cleaned with acetone, ethanol, and deionized water for 10 minutes, respectively. A ZnO thin film with a thickness of 15 nm was grown on the surface of the substrate by magnetron sputtering, the radio frequency power was 80 W, the flow rate of argon gas was 40 sccm, and the growth time was 10 min.

[0071] 2. Preparation of ZnO nanorod arrays: 0.025mol / L of Zn(NO 3 ) 2 ·6H 2 O (2.9749g) and 0.025mol / L of C 6 h 12 N 4 (1.419g) each took 10mL, mixed the above two solutions, and put them in the reaction kettle. Then, put the ITO conductive glass substrate coated with the seed layer solution vertically into it, react at 95°C for 3 hours, take out the substrate, clean it with deionized water, and dry it to get a neat substrate. ZnO nanorod arrays, see figure 2 a. From figure 2 a It can be seen that the nanorods grow perpendicular to the substrate and are uniformly arranged, with a diameter of 100...

Embodiment 2

[0079] 1. Grow ZnO seed layer: 1*1cm 2 The ITO substrate was ultrasonically cleaned with acetone, ethanol, and deionized water for 10 minutes, respectively. A ZnO thin film with a thickness of 15 nm was grown on the surface of the substrate by magnetron sputtering, the radio frequency power was 80 W, the flow rate of argon gas was 40 sccm, and the growth time was 10 min.

[0080] 2. Preparation of ZnO nanorod arrays: 0.025mol / L of Zn(NO 3 ) 2 ·6H 2 O (2.9749g) and 0.025mol / L of C 6 h 12 N 4(1.419g) each took 10mL, mixed the above two solutions, and put them in the reaction kettle. Then, put the ITO conductive glass substrate coated with the seed layer solution vertically into it, react at 95°C for 3 hours, take out the substrate, clean it with deionized water, and dry it to get a neat substrate. The ZnO nanorod array, the nanorods grow perpendicular to the substrate, are uniformly arranged, have a diameter of 100nm, and a length of 1μm.

[0081] 3. Preparation of ZnO@A...

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Abstract

The invention belongs to the technical field of molecular recognition, and particularly relates to a surface-enhanced Raman substrate with a three-dimensional multilayered structure and a preparationmethod thereof. The surface-enhanced Raman substrate with the three-dimensional multilayered structure comprises a substrate, a ZnO seed layer growing on the surface of the substrate, a ZnO nanorod array growing on the ZnO seed layer, an Ag nano-particle layer coating on the ZnO nanorod array, an Al2O3 dielectric layer growing on the structural surface of the ZnO nanorod array coated with the Ag nano-particle layer and an Ag nano-particle layer deposited on the Al2O3 dielectric layer. According to the surface-enhanced Raman substrate with the three-dimensional multilayered structure and the preparation method thereof, a method combining a chemical method and a magnetron sputtering and atomic layer deposition technology is adopted to prepare a novel composite structural SERS substrate, thestructure of the novel composite structural SERS substrate comprises a three-dimensional structure, a core-shell structure, a sandwich structure and the like, and the flexible and varied SERS substrate with abundant structures is of great significance for studying multiple SERS mechanisms and expanding the application field of SERS.

Description

technical field [0001] The invention belongs to the technical field of molecular recognition, and in particular relates to a surface-enhanced Raman substrate with a three-dimensional multilayer structure and a preparation method thereof. The substrate prepared by the method can be applied to a surface-enhanced Raman scattering substrate. Background technique [0002] Surface plasmon resonance is a phenomenon in which metal nanostructures interact with free electrons on the metal surface under light to generate related resonances. It has attracted much attention because of its unique optical properties at the nanoscale. / Metal oxide multilayer nanostructure and optical vector field on surface plasmon regulation will produce surface Raman enhancement, transmission enhancement, nonlinear optical enhancement, semiconductor carrier radiation recombination speed enhancement, luminous efficiency enhancement, A series of novel effects such as photocatalytic enhancement have attracte...

Claims

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Application Information

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IPC IPC(8): G01N21/65
CPCG01N21/658
Inventor 牟佳佳孙伟杰郝婷婷
Owner BEIHUA UNIV
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