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Element substrate, manufacturing method thereof, print head, and printing apparatus

By adopting a multi-layer structure element substrate design in the inkjet print head, the thin interlayer insulating film and the conductive plug are electrically connected, which solves the problem of insufficient sensitivity in nozzle failure detection and improves the detection accuracy of ink discharge status and printing quality.

Active Publication Date: 2019-04-19
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

Therefore, the distance between the printing element and the temperature detecting element is limited by the thickness of the insulating film between the wiring layers

Method used

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Embodiment Construction

[0022] Exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

[0023]In this specification, the terms "printing" and "printing" include not only the formation of distinctive information such as characters and graphics, but also broadly include the formation of images, charts, patterns, etc. on printing media or the processing of media, regardless of their are salient or non-salient and whether they are visualized so as to be visually perceivable by humans.

[0024] Furthermore, the term "printing medium (or sheet)" includes not only paper used in common printing devices, but also broadly includes materials capable of receiving ink, such as cloth, plastic film, metal plate, glass, ceramics, wood, and leather.

[0025] Also, the term "ink" (hereinafter also referred to as "liquid") should be broadly interpreted similarly to the definition of "printing" above. That is, "ink" includes a liquid that can form an...

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PUM

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Abstract

The invention discloses an element substrate, a manufacturing method thereof, a print head, and a printing apparatus. On an element substrate having a multilayered structure in which a temperature detection element is provided in an intermediate layer of a wiring layer and a print element layer, a wiring layer and a temperature detection element formed on the first interlayer insulation film are connected by a first conductive plug which penetrates through the first interlayer insulation film. In addition, a wiring layer and a print element which are formed on the second interlayer insulationfilm formed on the first interlayer insulation film are connected by a second conductive plug which penetrates through the first and second interlayer insulation films. By manufacturing the element substrate by this arrangement, the thickness of an interlayer insulation film between a print element and a temperature detection element can be made thin, and the sensitivity of the temperature detection element can be improved.

Description

technical field [0001] The present invention relates to an element substrate, a manufacturing method of the element substrate, a print head, and a printing apparatus, and particularly relates to an application for performing printing by using a print head incorporating an element substrate for integrating a temperature detection element, for example, according to an inkjet method printing device. Background technique [0002] For higher image quality and higher speed printing, the inkjet printhead has changed to an arrangement in which there are higher densities of printing elements and nozzles and a large number of nozzles are arranged. In recent years, in particular, a large number of full-line print heads in which a plurality of element substrates are arranged across the width of a printing medium such as printing paper have been proposed. [0003] On the other hand, as the number of nozzles increases, the possibility of ink discharge failures occurring in some nozzles i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B41J2/14B41J2/16
CPCB41J2/14016B41J2/14153B41J2/1601B41J2/1631B41J2/164B41J2/1645B41J2/1646B41J2/14129B41J2/1603B41J2/1628B41J2/1632B41J2/1642B41J2202/18B41J2/33535B41J2/3359B41J2/33595B41J2/3353B41J2/14072B41J2/04563
Owner CANON KK
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