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A compact charged particle detector

A charged particle and detector technology, applied in circuits, discharge tubes, electrical components, etc., can solve the problems of low space utilization, complex structure of charged particle monitors, etc., to save space, improve space utilization efficiency, and reduce volume. Effect

Inactive Publication Date: 2021-02-26
TIBET UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The present invention aims at the above-mentioned deficiencies in the prior art, and provides a compact charged particle detector capable of solving the problems of complex structure and low space utilization rate of the charged particle monitor in the prior art

Method used

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  • A compact charged particle detector
  • A compact charged particle detector
  • A compact charged particle detector

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Embodiment Construction

[0021] The present invention will be further described below in conjunction with accompanying drawing:

[0022] Such as figure 1 As shown in , it is a schematic diagram of the structure of a compact charged particle detector.

[0023] The compact charged particle detector of the present invention comprises a cylindrical or rectangular housing 4, and when densely arranged, the detector can be arranged as a rectangle to reduce the gap between the detectors; It is configured in a cylindrical shape to increase the charged particle trapping area of ​​a single detector.

[0024] One end of the casing 4 is provided with an attracting electrode 1, and a deflecting electrode 2 is arranged inside the casing 4, and a semiconductor-based detector 3 is arranged on the lower side of the deflecting electrode 2; the attracting electrode 1 includes an outer electrode 11 and an inner electrode 12, and the outer electrode 11 and the inner electrode 12 are all ring-shaped, and the center of the...

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Abstract

The invention discloses a compact type charged particle detector. The compact type charged particle detector comprises a cylindrical or rectangular shell, an attract electrode is arranged at one end of a shell, a deflection electrode is arranged in the shell, and a semiconductor-based detector is arranged at a lower side of the deflection electrode; the attract electrode comprises an outside electrode and an inside electrode; the outside electrode and the inside electrode are annular, and the centers of circle are coincident; the outside electrode and the inside electrode are connected througha resistor grid; the deflection electrode is annular, and the diameter is less than the outside electrode and greater than the inside electrode; and the voltage of the deflection electrode is higherthan that of the attract electrode. The problem that a charged particle monitor is complex in structure and low in space utilization rate in the prior art can be solved, the charged particle detectordisclosed by the invention is simple in structure, high in efficiency and strong reliability.

Description

technical field [0001] The invention relates to a monitoring device, in particular to a compact charged particle detector. Background technique [0002] Charged particle monitoring devices are an integral part of charged particle and particle beam related instruments, such as scanning electron microscopes. The electron beam emitted by the electron source collides with and deflects the surface of the specimen, releases signal electrons, including secondary particles and backscattered electrons, and is detected by the charged particle detector, thereby realizing the detection of the specimen surface. [0003] Since the signal particles are mainly secondary particles, their energy is small, and the direction of the released signal particles is scattered during the collision and deflection process between the electron beam and the surface of the specimen, even if electrodes are set in the detector to attract the secondary particles Particles, the number of secondary particles c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/244H01J37/28
Inventor 高启刘茂元陈雷
Owner TIBET UNIV