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82 results about "Charged particle detectors" patented technology
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Solid state beta-sensitive surgical probe
InactiveUS6076009ASensitive highMinimizing requisite sizeRadiation applicationsPretreated surfacesInfraredAudio power amplifier
An intraoperative probe system for preferentially detecting beta radiation over gamma radiation emitted from a radiopharmaceutical is described. In one embodiment, the probe system of the present invention is a probe having an ion-implanted silicon charged-particle detector for generating an electrical signal in response to received beta particles. In such an embodiment, a preamplifier may be located in close proximity to the detector filters and amplifies the electrical signal. Furthermore, a wire may be used to couple the probe to a processing unit for amplifying and filtering the electrical signal, and a counter may be utilized to analyze the resulting electrical signal to determine the number of beta particles being received by the detector. Alternatively, the wire can be replaced with an infrared or radio transmitter and receiver for wireless operation of the probe.
Owner:MICHIGAN THE UNIV OF RGT
Piezoelectric charged droplet source
InactiveUS20020158196A1Time-of-flight spectrometersSamples introduction/extractionBiopolymerCharged particle detectors
The invention provides devices, device configurations and methods for improved sensitivity, detection level and efficiency in mass spectrometry particularly as applied to biological molecules, including biological polymers, such as proteins and nucleic acids. Specifically, the invention relates to charged droplet sources and their use as ion sources and as components in ion sources. In addition, devices of this invention allow mass spectral analysis of a single charged droplet. Further, the charged droplet sources and ion sources of this invention can be combined with any charge particle detector or mass analyzer, but are a particularly benefit when used in combination with a time of flight mass spectrometer.
Owner:WISCONSIN ALUMNI RES FOUND
Detection Apparatus for Detecting Charged Particles, Methods for Detecting Charged Particles and Mass Spectrometer
ActiveUS20110095177A1Improve dynamic rangeProlong lifeTime-of-flight spectrometersSpectrometer detectorsPhoton detectionCharged particle detectors
Embodiments of the invention provide a detection apparatus for detecting charged particles having a secondary particle generator for generating secondary charged particles in response to receiving incoming charged particles, a charged particle detector for receiving and detecting secondary charged particles generated by the secondary particle generator, a photon generator for generating photons in response to receiving secondary charged particles generated by the secondary particle generator, and a photon detector for detecting the photons generated by the photon generator.
Owner:THERMO FISHER SCI BREMEN
Charged particle guide
ActiveUS7135678B2Reduce wearIncrease generationThermometer detailsMaterial analysis using wave/particle radiationCharged particle detectorsSecondary electrons
A charged particle guide adapted to be coupled with a charged particle detector, such as a secondary electron detector. The charged particle guide, in one example, comprising two wires extending from the charged particle detector toward a source of charged particles, such as secondary electrons emitted from an IC upon application of a focused ion beam. Upon application of a bias voltage, the charged particle guide introduces a collecting electric field that attracts charged particles and directs the charged particles to the charged particles detector.
Owner:DCG SYST
Charged Particle Beam Device With Retarding Field Analyzer
ActiveUS20090200463A1Improve spatial resolutionSmall sizeMaterial analysis using wave/particle radiationParticle separator tubesOptical axisImage resolution
The invention provides a charged particle beam device to inspect or structure a specimen with a primary charged particle beam propagating along an optical axis; a beam tube element having a tube voltage; and a retarding field analyzer in the vicinity of the beam tube element to detect secondary charged particles generated by the primary charged particle beam on the specimen. According to the invention, the retarding field analyzer thereby comprises an entrance grid electrode at a second voltage; at least one filter grid electrode at a first voltage; a charged particle detector to detect the secondary charged particles; and at least one further electrode element arranged between the entrance grid electrode and the at least one filter grid electrode. The at least one further electrode element reduces the size of the stray fields regions in the retarding electric field region to improve the energy resolution of the retarding field analyzer. The improvement of the energy resolution is significant, in particular when the beam tube element is part of a high voltage beam tube.
Owner:ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK GMBH
Method and apparatus for simultaneous detection and measurement of charged particles at one or more levels of particle flux for analysis of same
InactiveUS20080073548A1Solve the low detection efficiencyVariation can be minimizedThermometer detailsSpectrometer detectorsCharged particle detectorsParticle physics
A charged particle detector and method are disclosed providing for simultaneous detection and measurement of charged particles at one or more levels of particle flux in a measurement cycle. The detector provides multiple and independently selectable levels of integration and / or gain in a fully addressable readout manner.
Owner:INDIANA UNIV RES & TECH CORP +2
Droplet ion source for mass spectrometry
The invention provides devices, device configurations and methods for improved sensitivity, detection level and efficiency in mass spectrometry particularly as applied to biological molecules, including biological polymers, such as proteins and nucleic acids. In one aspect, the invention relates to charged droplet sources and their use as ion sources and as components in ion sources. In another aspect, the invention relates to charged droplet traps and their use as ion sources and as elements of ion sources. Further, the invention relates to the use of aerodynamic lenses for high efficiency ion transport to a charge particle analyzer, particularly a mass analyzer. Devices of this invention allow mass spectral analysis of a single charged droplet. The ion sources of this invention can be combined with any charge particle detector or mass analyzer, but are a particularly benefit when used in combination with a time of flight mass spectrometer.
Owner:WISCONSIN ALUMNI RES FOUND
Solid state beta-sensitive surgical probe
InactiveUS6456869B1Sensitive highMinimizing requisite sizeSolid-state devicesMaterial analysis by optical meansInfraredAudio power amplifier
An intraoperative probe system for preferentially detecting beta radiation over gamma radiation emitted from a radiopharmaceutical is described. In one embodiment, the probe system of the present invention is a probe having an ion-implanted silicon charged-particle detector for generating an electrical signal in response to received beta particles. In such an embodiment, a preamplifier may be located in close proximity to the detector filters and amplifies the electrical signal. Furthermore, a wire may be used to couple the probe to a processing unit for amplifying and filtering the electrical signal, and a counter may be utilized to analyze the resulting electrical signal to determine the number of beta particles being received by the detector. Alternatively, the wire can be replaced with an infrared or radio transmitter and receiver for wireless operation of the probe.
Owner:RGT UNIV OF MICHIGAN
Charged particle detection devices
ActiveUS20080315094A1Thermometer detailsMaterial analysis using wave/particle radiationLight guideCharged particle detectors
A charged particle detector consists of a plurality independent light guide modules assembled together to form a segmented in-lens on-axis annular detector, with a center hole for allowing the primary charged particle beam to pass through. One side of the assembly facing the specimen is coated with or bonded to scintillator material as the charged particle detection surface. Each light guide module is coupled to a photomultiplier tube to allow light signals transmitted through each light guide module to be amplified and processed separately. A charged particle detector is made from a single block of light guide material processed to have a cone shaped circular cutout from one face, terminating on the opposite face to an opening to allow the primary charged particle beam to pass through. The opposite face is coated with or bonded to scintillator material as the charged particle detection surface. The outer region of the light guide block is shaped into four separate light guide output channels and each light guide output channel is coupled to a photomultiplier tube to allow light signal output from each channel to be amplified and processed separately.
Owner:ASML NETHERLANDS BV
Charged particle detection system and method
ActiveUS20100294931A1High selectivitySolve the low detection efficiencyThermometer detailsMaterial analysis using wave/particle radiationCharged particle detectorsParticle physics
A system for selectively detecting charged particles produced due to operation of a charged particle beam column irradiating a specimen, including a proximal grid being selectively electrically biasable and configured for controllably directing the charged particles by electrically focusing the charged particles to compel selected secondary charged particles, whereupon being selected from the charged particles, to be attracted thereto, and to repel unselected secondary charged particles therefrom, a distal grid spaced apart from the proximal grid and separated therefrom by a gap and being selectively electrically biasable and configured for attracting the selected secondary and / or tertiary charged particles, whereupon being selected from the charged particles, to the distal grid, and to repel unselected tertiary charged particles therefrom, and a charged particle detector configured for detecting selected secondary charged particles attracted to the proximal and / or distal grid and detecting selected tertiary charged particles attracted to the distal grid, that impinge thereupon.
Owner:EL MUL TECH
Particle detector for secondary ions and direct and or indirect secondary electrons
ActiveUS20060289748A1Improve detection efficiencyOptical radiation measurementParticle separator tubesCharged particle detectorsSecondary electrons
A multi-purpose efficient charge particle detector that by switching bias voltages measures either secondary ions, or secondary electrons (SE) from a sample, or secondary electrons that originate from back scattered electrons (SE3), is described. The basic version of the detector structure and two stripped down versions enable its use for the following detection combinations: 1. The major version is for measuring secondary ions, or secondary electrons from the sample, or secondary electrons due to back-scattered electrons that hit parts other than the sample together or without secondary electrons from the sample. 2. Measuring secondary ions or secondary electrons from the sample (no SE3). 3. Measuring secondary electrons from the sample and / or secondary electrons resulting from back-scattered electrons hitting objects other than the sample (no ions).
Owner:EL MUL TECH
Charged particle detection devices
ActiveUS20090090866A1Stability-of-path spectrometersMaterial analysis using wave/particle radiationLight guideComputer module
A charged particle detector consists of four independent light guide modules assembled together to form a segmented on-axis annular detector, with a center opening for allowing the primary charged particle beam to pass through. One side of the assembly facing the specimen is coated with or bonded to scintillator material as the charged particle detection surface. Each light guide module is coupled to a photomultiplier tube to allow light signals transmitted through each light guide module to be amplified and processed separately. A charged particle detector is made from a single block of light guide material processed to have a cone shaped circular cutout from one face, terminating on the opposite face to an opening to allow the primary charged particle beam to pass through. The opposite face is coated with or bonded to scintillator material as the charged particle detection surface. The outer region of the light guide block is shaped into four separate light guide output channels and each light guide output channel is coupled to a photomultiplier tube to allow light signal output from each channel to be amplified and processed separately.
Owner:ASML NETHERLANDS BV
Charged particle beam detection system
InactiveUS20050274888A1Improve the level ofEasy to useSpectrometer detectorsMaterial analysis by electric/magnetic meansIntegratorDetector array
A charged particle beam detection system that includes a Faraday cup detector array (FCDA) for position-sensitive charged particle beam detection is described. The FCDA is combined with an electronic multiplexing unit (MUX) that allows collecting and integrating the charge deposited in the array, and simultaneously reading out the same. The duty cycle for collecting the ions is greater than 98%. This multiplexing is achieved by collecting the charge with a large number of small and electronically decoupled Faraday cups. Because Faraday cups collect the charge independent of their charge state, each cup is both a collector and an integrator. The ability of the Faraday cup to integrate the charge, in combination with the electronic multiplexing unit, which reads out and empties the cups quickly compared to the charge integration time, provides the almost perfect duty cycle for this position-sensitive charged particle detector. The device measures further absolute ion currents, has a wide dynamic range from 1.7 pA to 1.2 μA with a crosstalk of less than 750:1. The integration of the electronic multiplexing unit with the FCDA further allows reducing the number of feedthroughs that are needed to operate the detector.
Owner:UNIV OF WASHINGTON
Distributed Potential Charged Particle Detector
ActiveUS20120037802A1Extended service lifeReduce harmThermometer detailsMaterial analysis using wave/particle radiationElectrical resistance and conductanceLarge dose
A charged particle beam system for imaging and processing targets is disclosed, comprising a charged particle column, a secondary particle detector, and a secondary particle detection grid assembly between the target and detector. In one embodiment, the grid assembly comprises a multiplicity of grids, each with a separate bias voltage, wherein the electric field between the target and the grids may be adjusted using the grid voltages to optimize the spatial distribution of secondary particles reaching the detector. Since detector lifetime is determined by the total dose accumulated at the area on the detector receiving the largest dose, detector lifetime can be increased by making the dose into the detector more spatially uniform. A single resistive grid assembly with a radial voltage gradient may replace the separate grids. A multiplicity of deflector electrodes may be located between the target and grid to enhance shaping of the electric field.
Owner:FEI CO
Charged particle detector and detecting apparatus utilizing the same
InactiveUS20050012044A1Material analysis using wave/particle radiationMeasurement with scintillation detectorsPhotovoltaic detectorsPhotodetector
In a charged particle detector, the vacuum barrier can be reduced in size and a multichannel configuration is possible. A charged particle detector includes a metallic frame having one or more holes formed therein, a light transmitting member fixed in each of the holes of the metallic frame, an inorganic scintillation element fixed on a surface of the light transmitting member, the surface being on a first side of the member; and a photodetector disposed on a surface of the light transmitting member, the surface being on a second side opposing the first side of the member. Charged particles having passed through the inorganic scintillation element are sent via the light transmitting member to the photodetector and are detected by the photodetector.
Owner:HITACHI LTD
Charged particle beam device with retarding field analyzer
ActiveUS8203119B2Improve spatial resolutionSmall sizeStability-of-path spectrometersMaterial analysis using wave/particle radiationOptical axisImage resolution
Owner:ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK GMBH
Charged particle analyser and method
ActiveUS20100163725A1High acceptance angleReduce lossParticle separator tubesPhotoelectric discharge tubesCharged particle detectorsParticle physics
A charged particle analyser (1) comprises a first non-imaging electrostatic lens (8, 9) for receiving charged particles having divergent, trajectories and for converting the said trajectories into substantially parallel trajectories. At least one planar filter (10) is provided for receiving the charged particles having the substantially parallel trajectories and for filtering the charged particles in accordance with their respective energies. A second non-imaging electrostatic lens (11) receives the energy filtered charged particles and selectively modifies their trajectories as a function of their energies. A charged particle detector (12) then receives the charged particles in accordance with their selectively modified trajectories.
Owner:OXFORD INSTR NANOTECH TOOLS
Detection apparatus for detecting charged particles, methods for detecting charged particles and mass spectrometer
ActiveUS8680481B2Improve dynamic rangeProlong lifeThermometer detailsTime-of-flight spectrometersCharged particle detectorsParticle physics
Embodiments of the invention provide a detection apparatus for detecting charged particles having a secondary particle generator for generating secondary charged particles in response to receiving incoming charged particles, a charged particle detector for receiving and detecting secondary charged particles generated by the secondary particle generator, a photon generator for generating photons in response to receiving secondary charged particles generated by the secondary particle generator, and a photon detector for detecting the photons generated by the photon generator.
Owner:THERMO FISHER SCI BREMEN
Charged particle beam apparatus, charged particle detection method, and method of manufacturing semiconductor device
InactiveUS20050139789A1Material analysis using wave/particle radiationSemiconductor/solid-state device testing/measurementDevice materialCharged particle detectors
A charged particle beam apparatus includes: a charged particle beam source which generates a charged particle beam to irradiate the charged particle beam onto a specimen; a demagnification optical system which demagnifies the charged particle beam; a deflector which deflects the charged particle beam to scan the specimen; and a first charged particle detector having a detection surface to detect a charged particle generated from the specimen which has been irradiated with the charged particle beam; wherein the detection surface of the first charged particle detector is disposed so as to face towards the charged particle beam source.
Owner:KK TOSHIBA
Integrated pre-amplifier used for charged particle detector
ActiveCN103888084ASimple structureImprove signal-to-noise ratioAmplifier modifications to reduce noise influenceOperating pointAudio power amplifier
The invention provides an integrated pre-amplifier used for a charged particle detector. The integrated pre-amplifier comprises a signal preprocessing circuit, a charge sensitivity pre-amplification circuit, a pulse shaping circuit and a direct-current biasing circuit. The signal preprocessing circuit is used for preprocessing a charge signal generated by the detector and outputting a pulse signal; the charge sensitivity pre-amplification circuit is used for converting the pulse signal output by the signal preprocessing circuit to a voltage signal; the pulse shaping circuit is used for carrying out pulse shaping output on the voltage signal output by the charge sensitivity pre-amplification circuit; the direct-current biasing circuit carries out biasing on the quiescent operating point of an amplifier in the charge sensitivity pre-amplification circuit and the quiescent operating point of an amplifier in the pulse shaping circuit through resistor voltage division; the signal preprocessing circuit, the charge sensitivity pre-amplification circuit, the pulse shaping circuit and the direct-current biasing circuit are integrally connected. The integrated pre-amplifier can achieve measurement of charged particles with sedimentary energy larger than 57 keV.
Owner:NAT SPACE SCI CENT CAS
Charged particle detectors with active detector surface for partial energy deposition of the charged particles and related methods
InactiveUS20120091354A1Solid-state devicesMaterial analysis by optical meansElectron holeCharge carrier
A radiation detector is disclosed. The radiation detector comprises an active detector surface configured to generate charge carriers in response to charged particles associated with incident radiation. The active detector surface is further configured with a sufficient thickness for a partial energy deposition of the charged particles to occur and permit the charged particles to pass through the active detector surface. The radiation detector further comprises a plurality of voltage leads coupled to the active detector surface. The plurality of voltage leads are configured to couple to a voltage source to generate a voltage drop across the active detector surface and to separate the charge carriers into a plurality of electrons and holes for detection. The active detector surface may comprise one or more graphene layers. Timing data between active detector surfaces may be used to determine energy of the incident radiation. Other apparatuses and methods are disclosed herein.
Owner:BATTELLE ENERGY ALLIANCE LLC
Charged particle detection system and method
ActiveUS8222600B2Improved selectivity and detection efficiencyThermometer detailsMaterial analysis using wave/particle radiationCharged particle detectorsParticle physics
A system for selectively detecting charged particles produced due to operation of a charged particle beam column irradiating a specimen, including a proximal grid being selectively electrically biasable and configured for controllably directing the charged particles by electrically focusing the charged particles to compel selected secondary charged particles, whereupon being selected from the charged particles, to be attracted thereto, and to repel unselected secondary charged particles therefrom, a distal grid spaced apart from the proximal grid and separated therefrom by a gap and being selectively electrically biasable and configured for attracting the selected secondary and / or tertiary charged particles, whereupon being selected from the charged particles, to the distal grid, and to repel unselected tertiary charged particles therefrom, and a charged particle detector configured for detecting selected secondary charged particles attracted to the proximal and / or distal grid and detecting selected tertiary charged particles attracted to the distal grid, that impinge thereupon.
Owner:EL MUL TECH
Electrostatic lenses and systems including the same
InactiveCN103858201AImprove transmission efficiencyReduce accumulationBeam/ray focussing/reflecting arrangementsElectron/ion optical arrangementsCharged particle detectorsOptoelectronics
A system includes an electrostatic lens positioned between a charged-particle source and a detector. The lens includes: a first electrode having a first aperture in the path and aligned with a first axis; a second electrode in the path between the first electrode and the charged-particle detector, the second electrode having a second aperture positioned in the path and aligned with a second axis parallel to the first axis and displaced from the first axis along a first direction; a third electrode in the path between the first electrode and the second electrode; and a potential generator coupled to the first, second, and third electrodes.; During operation, the potential generator applies first, second, and third potentials to the first, second, and third electrodes, respectively, so that the electrostatic lens directs a beam of charged particles from the charged-particle source propagating along the first axis to propagate along the second axis.
Owner:PERKINELMER HEALTH SCIENCES INC
X-ray and charged particle detector based on graphene electric field effect and detection method thereof
InactiveCN104062676AImprove performanceSensitiveRadiation intensity measurementX-rayCharged particle detectors
The invention provides an X-ray and charged particle detector based on graphene electric field effect and a detection method thereof, belongs to the technical field of radiation detection and relates to a novel X-ray and charged particle detector structure. The X-ray and charged particle detector based on graphene electric field effect comprises a semiconductor substrate, a gate electrode, an insulating buffer layer, a source electrode, a drain electrode, a graphene detection layer, a graphene voltage measuring electrode and a constant-current supply electrode. The detector has relatively high energy resolution and time resolution simultaneously, and is applicable to the application fields of X-ray pulsar navigation and traditional radiation detectors and is used for detecting X-rays and charged particles such as alpha rays and beta rays.
Owner:CHINA ACADEMY OF SPACE TECHNOLOGY
Apparatus and method for inspecting a surface of a sample
ActiveUS20150270095A1Reduce blurHigh resolutionMaterial analysis using wave/particle radiationElectric discharge tubesOptical axisLight beam
The invention relates to an apparatus and method for inspecting a sample. The apparatus comprises a generator for generating an array of primary charged particle beams (33), and a charged particle optical system with an optical axis (38). The optical system comprises a first lens system (37, 310) for focusing all primary beams (33) into a first array of spots in an intermediate plane, and a second lens system (313, 314) for focusing all primary beams (33) into a second array of spots on the sample surface (315). The apparatus comprises a position sensitive backscattered charged particle detector (311) positioned at or near the intermediate plane. The second lens system comprises an electromagnetic or electrostatic lens which is common for all charged particle beams. Preferably the second lens system comprises a magnetic lens for rotating the array of primary beams (33) around the optical axis (38) to position the second array of charged particle spots with respect to the first array at an angle.
Owner:TECH UNIV DELFT
Charged particle beam detection system
InactiveUS7282709B2Improve the level ofEasy to useThermometer detailsStability-of-path spectrometersIntegratorDetector array
A charged particle beam detection system that includes a Faraday cup detector array (FCDA) for position-sensitive charged particle beam detection is described. The FCDA is combined with an electronic multiplexing unit (MUX) that allows collecting and integrating the charge deposited in the array, and simultaneously reading out the same. The duty cycle for collecting the ions is greater than 98%. This multiplexing is achieved by collecting the charge with a large number of small and electronically decoupled Faraday cups. Because Faraday cups collect the charge independent of their charge state, each cup is both a collector and an integrator. The ability of the Faraday cup to integrate the charge, in combination with the electronic multiplexing unit, which reads out and empties the cups quickly compared to the charge integration time, provides the almost perfect duty cycle for this position-sensitive charged particle detector. The device measures further absolute ion currents, has a wide dynamic range from 1.7 pA to 1.2 μA with a crosstalk of less than 750:1. The integration of the electronic multiplexing unit with the FCDA further allows reducing the number of feedthroughs that are needed to operate the detector.
Owner:UNIV OF WASHINGTON
Method and apparatus for simultaneous detection and measurement of charged particles at one or more levels of particle flux for analysis of same
InactiveUS7498585B2Solve the low detection efficiencyVariation can be minimizedThermometer detailsSpectrometer detectorsCharged particle detectorsParticle physics
A charged particle detector and method are disclosed providing for simultaneous detection and measurement of charged particles at one or more levels of particle flux in a measurement cycle. The detector provides multiple and independently selectable levels of integration and / or gain in a fully addressable readout manner.
Owner:INDIANA UNIV RES & TECH CORP +2
Measuring momentum for charged particle tomography
ActiveUS20080265156A1Reduce noiseSufficient massThermometer detailsBeam/ray focussing/reflecting arrangementsMomentumTomography
Methods, apparatus and systems for detecting charged particles and obtaining tomography of a volume by measuring charged particles including measuring the momentum of a charged particle passing through a charged particle detector. Sets of position sensitive detectors measure scattering of the charged particle. The position sensitive detectors having sufficient mass to cause the charged particle passing through the position sensitive detectors to scatter in the position sensitive detectors. A controller can be adapted and arranged to receive scattering measurements of the charged particle from the charged particle detector, determine at least one trajectory of the charged particle from the measured scattering; and determine at least one momentum measurement of the charged particle from the at least one trajectory. The charged particle can be a cosmic ray-produced charged particle, such as a cosmic ray-produced muon. The position sensitive detectors can be drift cells, such as gas-filled drift tubes.
Owner:TRIAD NAT SECURITY LLC
Charged-particle detector
InactiveUS20110095174A1Adequate decompressionAvoid problemsIsotope separationMutiple dynode arrangementsCharged particle detectorsAtomic physics
This ion detector includes an MCP and a plurality of planar dynodes respectively having a plurality of slits. The plurality of planar dynodes are stacked via spacers parallel to an electron output plane of the MCP, and the first stage planar dynode is opposed parallel to the electron output plane. In accordance with this ion detector, it is possible to obtain output signals having the linearity reaching mV order, and to shorten its pulse width to approximately 600 ps.
Owner:HAMAMATSU PHOTONICS KK
Charged particle beam apparatus
It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the sample based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.
Owner:HITACHI LTD
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