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Vacuum pump, and spiral plate, spacer, and rotating cylinder included in the vacuum pump

A vacuum pump, helical technology, applied to the components, pump elements, pumps, etc. of the pumping device for elastic fluids, can solve the problems of stress concentration, stress rise, etc., achieve smooth flow, reduce warpage, and reduce accumulation. Effect

Active Publication Date: 2021-12-03
EDWARDS JAPAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0013] However, if the angle is made smaller on the downstream side, the stress at the base of the spiral plate 9 (joint portion between the rotor 8 and the spiral plate 9 ) may increase (stress concentration)

Method used

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  • Vacuum pump, and spiral plate, spacer, and rotating cylinder included in the vacuum pump
  • Vacuum pump, and spiral plate, spacer, and rotating cylinder included in the vacuum pump
  • Vacuum pump, and spiral plate, spacer, and rotating cylinder included in the vacuum pump

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0062] use figure 2 Of the above-described vacuum pump disposed in a helical plate 900 and the spacer 700 will be described.

[0063] figure 2 Is a diagram illustrating an embodiment of the present invention is related to a helical plate 900 and spacer member 700, is figure 1 Enlarged view of a stepped portion indicated by a dotted line A.

[0064] like figure 2 , In the downstream (exhaust ports 6) disposed on the side longer than the blade is located upstream (the intake port 4) of the side plate 9 short helical spiral plate 900. A slit in the present embodiment 1, the blade length is shortened to form a boundary on a spiral plate 9 as a boundary, the blade length would become shorter after the first one (downstream) of the helical plate disposed 900 is a spiral plate. Further, the stepped portion blade length variation may be provided at two or more locations.

[0065] And having a ratio of the inner diameter of the spacer is provided on the upstream side 70 of the spacer 700 ...

Embodiment approach 2

[0068] image 3 Schematic configuration is a diagram showing embodiment the vacuum pump 100 according to Embodiment 2 of the present invention.

[0069] Further, the same reference numerals are given to equivalent structures Embodiment 1 and description thereof is omitted.

[0070] In the second embodiment, the above-described embodiment 1, to a boundary stepped portion is provided on the downstream side than the spacer member 700 having an inner diameter smaller spacer 70 is provided on the upstream side.

[0071] Here, the present embodiment is provided in the spacer 710 in embodiment 2.

[0072] Further, in the embodiment than the embodiment spacer member 710 is provided with a position on the downstream side of the same spacer 700 1.

[0073] Figure 4 Is a diagram illustrating an embodiment of the present invention is related to a helical plate 2 and the spacer 900 710, is image 3 FIG stepped enlarged portion indicated by a dotted line B.

[0074] like Figure 4 , In the embod...

Embodiment approach 3

[0085] Figure 5 Is a diagram showing a schematic configuration example of an embodiment of the present invention, compound 3 of the vacuum pump 110.

[0086] In related embodiments of the composite vacuum pump 1103, the intake port 4 side is provided with a turbo molecular pump portion T, and the exhaust port 6 is provided with a thread groove pump-side portion S, which is disposed between the coil comprising the plate-like structure 700 and the spacer 900.

[0087] In more detail, the turbo-molecular pump portion T of the intake port 4 side of the rotor 8 includes a multi-piece rotor blade airfoil shape of the wing 90 and 91. Wing 91 toward the predetermined angle inclined from a plane perpendicular to the shaft axis 7 from the inner surface of the housing 2 of the blade shaft 7 extending configuration, with the rotor blades 90 offset from one another in the axial direction is provided with multiple class.

[0088] Further, the thread groove pump portion S includes a cylindrical...

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PUM

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Abstract

The object of the present invention is to realize a vacuum pump which keeps the exhaust capacity high and consumes less power. In the vacuum pump according to the embodiment of the present invention, the outer diameter of the arranged spiral plate is made smaller on the downstream side than on the upstream side. That is, a step portion is provided in which the blade length of the helical plate disposed on the downstream side is shorter than the blade length of the helical plate disposed on the upstream side. Furthermore, an escape portion forming portion is provided on the spacer arranged at the step portion, and the spacer on the upstream side in the step portion (that is, the spacer facing the helical plate whose outer diameter is not reduced) ) and the spacer on the downstream side (that is, the spacer facing the helical plate that reduces the outer diameter) have the same inner diameter of the contact surface. With this structure, it is possible to realize a vacuum pump that maintains high exhaust capacity and consumes less power.

Description

Technical field [0001] The present invention relates to a vacuum pump, and a spiral plate and a spacuator included in a vacuum pump. [0002] In detail, it is particularly related to a vacuum pump that will decrease in a spiral plate disposed on the downstream side, and a spiral plate and a spacer provided in the vacuum pump. Background technique [0003] In a vacuum pump used to perform a vacuum exhaust treated in a vacuum chamber, a gas transfer mechanism is accommodated, and the gas transfer mechanism is composed of a rotating portion and a fixing portion, which is a structure that exerts an exhaust function. [0004] In the gas transfer mechanism, a structure is compressed by means of a helical plate disposed on the rotating portion and a fixed disk disposed on the fixing portion. [0005] Patent Document 1: Japan Special Table 2015-505012. [0006] In Patent Document 1, the following technique is described: a spiral plate (spiral wing 30, etc.) is provided on the side surfac...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04D19/04
CPCF04D19/04F04D19/042F04D29/644F04D29/542F04D17/168F04D29/322F04D29/324F05D2210/12F05D2240/20F04D29/384F04D29/544
Inventor 桦泽刚志
Owner EDWARDS JAPAN