Cassette clamping mechanism

Abstract

In order to solve the technical problem that a clamping mechanism cannot clamp the cassette or is easy to hit and damage the cassette when clamping a cassette downwards, the invention provides a cassette clamping mechanism comprising a screw rod stepping motor, a shaft sleeve, a connecting shaft, two shaft rods and a pair of clamping arms. The connecting shaft is perpendicular to a screw rod shaft; the shaft sleeve carries the connecting shaft to lift up and lower down when lifting up and lowering down along the screw rod shaft; the two shaft rods and the connecting shaft are in parallel and are arranged on two sides of the connecting shaft; a connecting plate movably arranged on the connecting shaft in a sleeving way is arranged at one ends of the shaft rods; the pair of clamping arms arefixed to the other ends of the two shaft rods; a driving lever switch is arranged in each clamping arm; and a driving lever of each driving lever switch downwards extends to the lower part of the corresponding clamping arm. The screw rod stepping motor and the shaft sleeve drive the pair of clamping arms to rotate and contract inwards and rotate and open outwards, so that the cassette can be stably clamped; and in addition, the driving lever switches are always located above the cassette before the clamping mechanism moves downwards, so that the position and the height of the cassette can beeffectively identified.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, and mainly relates to wafer manufacturing equipment, especially for wafer boat clamping mechanisms. Background technique [0002] In the manufacturing plants of the semiconductor industry, multiple wet process equipments are usually configured to process a large number of wafers in batches. In order to meet the types of electronic products, wafers or substrates of different shapes and sizes are used. Therefore, when performing the wet process, the types of cas setters used will also be different. For example, when a 4-inch or 6-inch substrate is used for a wet process, generally a wafer boat of a corresponding size is used to carry the substrate. [0003] The existing crystal boat clamping mechanism uses a clamping force perpendicular to the direction of the crystal boat to clamp the crystal boat, but it is found in actual use that the clamping mechanism often fails to clamp...

AI Technical Summary

Problems solved by technology

[0003] The existing crystal boat clamping mechanism uses a clamping force perpendicular to the direction of the crystal boat to clamp the crystal boat, but it is found in actual use that the clamping mechanism often fails to clamp or touches the wafer when the clamping mechanism clamps the wafer downward. The reason for the damage to the crystal boat is related to the inability of the clamping mechanism to effectively identify the position and height of the wafer boat before going down

Images