A kind of manufacturing method of molybdenum step target
A manufacturing method and step technology, which is applied in the field of molybdenum step target manufacturing, can solve the problems of high molybdenum hardness, difficult molybdenum step target processing and forming, and poor machining performance, so as to improve confidence, facilitate picking, and prevent part deformation Effect
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[0028] The outer dimension of the molybdenum step target prepared in this example is 10000 μm in length × 10000 μm in width, the frame width of the molybdenum step target is 100 μm, the inner base is 4900 μm in length × 9800 μm in width × 30 μm in thickness, and the steps are 4900 μm in length × 9800 μm in width × 40 μm in thickness . Its preparation process is as follows:
[0029] a. Using rolled molybdenum thin film, the molybdenum thin film is 100 μm thick, and processed into 10000 μm×10000 μm molybdenum blank by slow wire cutting;
[0030] b. Measure the thickness value H1 of the molybdenum blank by laser confocal measuring device;
[0031] c. Clamp the metal block with flat surface on the electric discharge milling machine;
[0032] d. Process the horizontal plane on the surface of the metal block by electric discharge milling, the size of the horizontal plane is 12000 μm × 12000 μm, and at the same time, the coordinate value H2 of the horizontal plane of the metal bloc...
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