Lens three-dimensional contour measuring device and method based on current wave number scanning

A technology of three-dimensional profile and measuring device, which is applied in the direction of measuring device, optical device, machine/structural component testing, etc. It can solve the problems of slow image acquisition speed, complicated and expensive experimental device, and high environmental requirements, so as to avoid blur effect, Easy implementation and good device stability

Inactive Publication Date: 2019-07-09
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

It has high measurement accuracy, vertical and horizontal resolutions up to atomic level, but the measurement range, whether horizontal or vertical, is very narrow, and it involves many technical difficulties, complex operation, high environmental requirements, and slow image acquisition speed. Complex and expensive installation

Method used

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  • Lens three-dimensional contour measuring device and method based on current wave number scanning
  • Lens three-dimensional contour measuring device and method based on current wave number scanning
  • Lens three-dimensional contour measuring device and method based on current wave number scanning

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Embodiment 1

[0057] Such as Figure 1 to Figure 3 As shown, this embodiment discloses a lens three-dimensional profile measurement device based on current wavenumber scanning, the three-dimensional profile measurement device mainly includes a semiconductor laser 1 that emits relevant light, a beam splitting prism 2 that divides the relevant light into two parts, and an optical wedge 4. A CCD camera 5 for capturing the interference spectrum of reflected light, a computer 6 for processing image information, a laser controller 7 for adjusting the operating temperature and current of the semiconductor laser 1, and a bi-telecentric lens 8 for improving measurement accuracy.

[0058] Specifically, the semiconductor laser 1, the bi-telecentric lens 8, the optical wedge 4, and the lens under test 3 are sequentially arranged counterclockwise, and the beam splitting prism 2 is located at the center. The relevant light is emitted from the semiconductor laser 1, passes through the dichroic prism 2, an...

Embodiment 2

[0094] See attached Figure 1 to Figure 4 As shown, a kind of lens three-dimensional profile measurement device based on current wavenumber scanning described in the present embodiment is composed of semiconductor laser 1, beam splitting prism 2, lens, optical wedge 4, CCD camera 5, bi-telecentric lens 8, computer 6 and The laser controller consists of 7 components. Among them, the model of the semiconductor laser 1 is HL63603TG; the center thickness of the optical wedge 4 is 6 mm, and the inclination angle is 6'.

[0095] The measurement steps and principles of the present embodiment are as follows:

[0096] (1) Before the camera collects data, use the Tsai two-step method to calibrate the camera;

[0097] (2) computer 6 controls the exposure time of CCD camera 5, collection interval time and collection quantity; The correlation value of laser controller 7 is set;

[0098] (3) The laser controller 7 controls the operating current of the semiconductor laser 1 so that it emi...

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Abstract

The invention discloses a lens three-dimensional contour measuring device and method based on current wave number scanning. The measuring device comprises a semiconductor laser emitting relevant light, a beam splitting prism separating the relevant light into two parts, a wedge, a CCD camera capturing the interference spectrum of the reflected light, a computer processing image information, a laser controller adjusting the operating temperature and current of the semiconductor laser, and a dual telecentric lens improving measurement accuracy. When measuring, a high-precision contour of the lens can be obtained just by changing the working current by about 10mA, and there is no any mechanical contact with the surface of the lens, thereby avoiding damage to the lens surface. During the dataprocessing process, the interference signal correlation spectral decomposition and the complex linear least squares algorithm are used to accurately separate the interference phases of the surfaces from the interference signals, thereby avoiding the blur effect of the Fourier transform window function convolution, and improving the accuracy of the measurement. The lens three-dimensional contour measuring device and method also have the advantages of simple structure, convenient operation and easy implementation.

Description

technical field [0001] The invention relates to the technical field of optical element detection, in particular to a lens three-dimensional profile measurement device and measurement method based on current wavenumber scanning. Background technique [0002] With the continuous development of science and technology, the application range of optical components is becoming wider and wider, and the requirements for processing precision of optical components are also getting higher and higher. In an optical system, a lens is one of the most common optical components. The three-dimensional profile structure information of the lens is a factor that affects its optical performance. Once the optical performance is not up to standard, it will have a great negative impact on the entire optical system. Therefore, checking whether the three-dimensional profile of the lens meets the standard is an important link in the lens production process. [0003] At present, there are phase-shift ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
CPCG01B11/2441G01B9/02005G01M11/0271G01B9/02042
Inventor 周延周古宇达李谦谦全绍琛蔡瑞涵
Owner GUANGDONG UNIV OF TECH
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