Design method of micro-cantilever probe
A technology of micro-cantilever beam and design method, applied in the direction of design optimization/simulation, etc., can solve the problems of not paying attention to ultra-low friction coefficient measurement, difficult control, complex system, etc.
Active Publication Date: 2021-02-12
TSINGHUA UNIV
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[0003] However, at present, the ultra-low friction coefficient measurement under nanoscale single point non-contact state is a recognized technical problem. In terms of performance testing and other aspects, basically no attention has been paid to the measurement of ultra-low friction coefficient; secondly, the nanoscale single-point non-contact state control requires the atomic force microscope probe to be in vibration mode, which is difficult to achieve in an atmospheric environment and must be performed in a special environment (vacuum, liquid, etc.) etc.), therefore, the control is difficult and the system is complex
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[0047] In order to facilitate the understanding of the present invention, the design method of the micro-cantilever beam probe will be described more fully below with reference to the relevant drawings. The preferred embodiment of the design method of the micro-cantilever beam probe is given in the accompanying drawings. However, the method of designing a microcantilever probe can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the design method of the micro-cantilever beam more thorough and comprehensive.
[0048] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field of the invention. The terminology used herein in the description of the design method of the micro-cantilever probe is only for the purpose of describing specific embo...
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The invention discloses a design method of a micro-cantilever beam probe, comprising: acquiring a universal theoretical model for measuring the friction coefficient of the micro-cantilever beam probe; acquiring vibration parameters of micro-cantilever beam probes with different structures, Adapting the theoretical model to establish a theoretical model for measuring the friction coefficient of micro-cantilever beam probes with different structural characteristics; calculate the maximum measured value of the normal pressure of the micro-cantilever beam probe or the minimum measured value of friction force according to the theoretical model, and distinguish according to the measurable friction coefficient The distribution of different sizes of the micro-cantilever probe that meets the resolution requirements of the friction coefficient is obtained; the size is selected for simulation analysis to obtain the vibration frequency characteristics of the micro-cantilever probe, and the friction coefficient is obtained according to the vibration frequency characteristics and the universal theoretical model The magnitude of resolution; if the magnitude of the resolution of the friction coefficient meets the preset requirements of the resolution of the friction coefficient, the size of the micro-cantilever probe is extracted. The above method realizes the ultra-low friction coefficient measurement with a resolution of 0.0001 and above.
Description
technical field [0001] The invention relates to the technical field of analysis and measurement control, in particular to a design method of a micro-cantilever beam probe. Background technique [0002] With the rapid growth of the world economy, the losses caused by friction and wear in various industries have also increased accordingly, and the energy crisis has become increasingly severe. In recent years, the discovery of superslip phenomenon provides a new important way to solve the problem of energy consumption. In the super-slip state, the friction coefficient is an order of magnitude lower than that of conventional oil lubrication, and the wear rate is extremely low, close to zero. There are many factors that affect the superslip state and are coupled with each other, which seriously restricts the in-depth study of superslip theory and technology. Nanoscale single-point non-contact (that is, the size of the interaction area is on the order of nanometers) can eliminat...
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IPC IPC(8): G06F30/23
CPCG06F30/23
Inventor 谭新峰郭丹江亮师帅雒建斌
Owner TSINGHUA UNIV