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CVD equipment

A device and fixture technology, applied in the field of chemical vapor deposition equipment, can solve the problems of easy installation deviation and long installation time of grounding belts

Inactive Publication Date: 2019-08-23
KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the process of use, the installation time of the grounding strap is long, and it is prone to deviation during installation

Method used

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  • CVD equipment
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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] The inventors have found that the existing grounding straps are designed and installed as figure 1 As shown, the fixing pin (RF Block screw) passes through the base, and then passes through the RF Block with the grounding strap in the middle to fix one end of the grounding strap on the base, and the other end of the grounding strap passes through the grounding strap through screws, etc. The through hole at the other end is fixed at the bottom of the chamber of the deposition equipment; the installation time of the grounding belt is long, and it is prone to deviation during installation. The service life of the grounding belt is shortened, and the utilization rate of the equipment is reduced.

[0034] An embodiment of the present invention provides a CVD device, including a base, a ground belt, and a fixing device.

[0035] The grounding strap is connected between the base and the grounding terminal at the bottom of the device to eliminate static electricity. At least o...

Embodiment 2

[0053] The embodiment of the present invention provides a preferred implementation of the fixing device in the CVD equipment provided in the above embodiments, wherein the first clamp 1 and the second clamp 2 are hinged through a hinge shaft, so that the fixing device has the The clamping position where the first clamp 1 and the second clamp 2 are attached, and the open position where the first clamp 1 and the second clamp 2 are opened, when the fixing device is in the clamping position, The positioning column 11 passes through the positioning hole 21 to fix the end of the grounding strap 3 . The first clamp 1 and the second clamp 2 are hingedly connected to form a hinge structure, such as image 3 and Figure 4 , including a first hinge 4 and a second hinge 5, wherein the first hinge 4 serves as the first clamp 1, and the second hinge 5 serves as the second clamp 2.

[0054] There are at least two positioning columns 11 on the first hinge 4; the second hinge 5 is hinged wit...

Embodiment 3

[0069] This embodiment also provides a CVD equipment, such as Figure 4 As shown, it includes: the fixing device in the above-mentioned embodiment 1 fixed on the base of the CVD equipment, and the fixing device in the above-mentioned embodiment 2 fixed on the bottom ground end of the CVD equipment. The fixing device can effectively control the direction of the grounding belt when it is installed, and it is not easy to produce deviation during installation, which avoids the uneven force on both sides of the grounding belt caused by the installation offset of the grounding belt, thus causing the problem of breaking the grounding belt; It can ensure the linearity of the installation direction of the grounding belt, prevent the grounding belt from breaking during use, and prolong the service life of the grounding belt.

[0070] Of course, as an alternative embodiment, both ends of the grounding strap can use the fixing device in embodiment 1 or the fixing device in embodiment 2.

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Abstract

The invention provides CVD equipment. The CVD equipment comprises a base, a grounding band and a fixing device, wherein the grounding band is connected between the base and the grounding end of the bottom of the equipment; at least one end of the grounding band is provided with connecting holes; the fixing device is suitable for being fixed to the base and / or the grounding end; the fixing device comprises a first fixture and a second fixture; the first fixture is provided with at least two locating columns; the grounding end is arranged on the locating columns through the connecting holes in apenetration mode; the second fixture is opposite to the first fixture; the second fixture is provided with at least two locating holes matched with the at least two locating columns; the locating columns and the locating holes are matched to clamp the end of the grounding band between the first fixture and the second fixture. The grounding band is located and installed through the locating columns and the locating holes. The installation time is reduced. Moreover, the CVD equipment is not prone to installation deviation during reinstallation after locating.

Description

technical field [0001] The invention relates to the technical field of chemical vapor deposition equipment, in particular to a CVD equipment. Background technique [0002] Chemical vapor deposition (Chemical Vapor Deposition, abbreviated as CVD) is a process in which gaseous substances undergo chemical reactions on solid surfaces to form solid deposits. [0003] The vacuum chemical vapor deposition equipment has a base (Susceptor) for substrate heating. The surrounding edges of the base need to be equipped with grounding belts (Grounding). The grounding belt is used to remove static electricity from the base itself. However, during use, the installation time of the grounding strap is long, and it is prone to deviation during installation. Contents of the invention [0004] Based on this, the present invention provides a kind of CVD equipment, comprising: [0005] base; [0006] A grounding strap is connected between the base and the grounding terminal at the bottom of t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/44H01R4/64H01R11/01H01R11/05H05F3/02
CPCC23C16/44H01R4/64H01R11/01H01R11/05H05F3/02
Inventor 檀长兵
Owner KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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