A kind of nanometer multilayer film suitable for the surface of titanium alloy and its preparation method
A nano-multi-layer, titanium alloy technology, applied in the direction of metal material coating process, coating, vacuum evaporation plating, etc., can solve the problems of unsatisfactory bonding force and internal stress, so as to ensure the success rate, high hardness, and preparation The effect of process convenience
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Embodiment 1
[0041] A kind of nanometer multi-layer thin film that is applicable to the surface of titanium alloy, it is characterized in that, it is made of five thin film layers; From the titanium alloy surface outwards successively is titanium nitride thin film layer, and its thickness is about 190nm; Titanium carbide thin film layer , its thickness is about 190nm; titanium nitride film layer, its thickness is about 190nm; titanium carbide film layer, its thickness is about 190nm; aluminum-doped diamond-like film layer, its thickness is about 240nm; The thickness is about 1000nm.
Embodiment 2
[0043] A kind of nanometer multi-layer thin film that is applicable to the surface of titanium alloy is characterized in that, it is made of five thin film layers; From the surface of titanium alloy outwards is the titanium nitride thin film layer successively, and its thickness is about 200nm; Titanium carbide thin film layer , its thickness is about 200nm; titanium nitride film layer, its thickness is about 200nm; titanium carbide film layer, its thickness is about 200nm; aluminum-doped diamond-like film layer, its thickness is about 250nm; The thickness is about 1050nm.
Embodiment 3
[0045] A kind of nanometer multi-layer thin film that is applicable to the surface of titanium alloy, it is characterized in that, it is made of five thin film layers; From the titanium alloy surface outwards successively is titanium nitride thin film layer, and its thickness is about 250nm; Titanium carbide thin film layer , its thickness is about 250nm; titanium nitride film layer, its thickness is about 250nm; titanium carbide film layer, its thickness is about 250nm; aluminum-doped diamond-like film layer, its thickness is about 250nm; The thickness is about 1250nm.
[0046] The nano-multilayer film suitable for the surface of titanium alloy obtained in the above-mentioned embodiments 1-3 is prepared by the following system and method:
[0047] A preparation system for nano-multilayer films suitable for the surface of titanium alloys, using electron cyclotron resonance (ECR), two sets of target intermediate frequency magnetron sputtering devices, and a set of ring target D...
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