A kind of nanometer multilayer film suitable for the surface of titanium alloy and its preparation method

A nano-multi-layer, titanium alloy technology, applied in the direction of metal material coating process, coating, vacuum evaporation plating, etc., can solve the problems of unsatisfactory bonding force and internal stress, so as to ensure the success rate, high hardness, and preparation The effect of process convenience

Active Publication Date: 2021-05-18
CHONGQING UNIV OF ARTS & SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

If the aluminum-doped diamond-like film is directly prepared on the surface of the titanium alloy, although the bonding force of the film matrix can be improved to a certain extent and the internal stress can be reduced, the bonding force and internal stress still cannot meet the requirements of high-intensity operations such as aerospace and geological drilling. field

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  • A kind of nanometer multilayer film suitable for the surface of titanium alloy and its preparation method
  • A kind of nanometer multilayer film suitable for the surface of titanium alloy and its preparation method
  • A kind of nanometer multilayer film suitable for the surface of titanium alloy and its preparation method

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Embodiment 1

[0041] A kind of nanometer multi-layer thin film that is applicable to the surface of titanium alloy, it is characterized in that, it is made of five thin film layers; From the titanium alloy surface outwards successively is titanium nitride thin film layer, and its thickness is about 190nm; Titanium carbide thin film layer , its thickness is about 190nm; titanium nitride film layer, its thickness is about 190nm; titanium carbide film layer, its thickness is about 190nm; aluminum-doped diamond-like film layer, its thickness is about 240nm; The thickness is about 1000nm.

Embodiment 2

[0043] A kind of nanometer multi-layer thin film that is applicable to the surface of titanium alloy is characterized in that, it is made of five thin film layers; From the surface of titanium alloy outwards is the titanium nitride thin film layer successively, and its thickness is about 200nm; Titanium carbide thin film layer , its thickness is about 200nm; titanium nitride film layer, its thickness is about 200nm; titanium carbide film layer, its thickness is about 200nm; aluminum-doped diamond-like film layer, its thickness is about 250nm; The thickness is about 1050nm.

Embodiment 3

[0045] A kind of nanometer multi-layer thin film that is applicable to the surface of titanium alloy, it is characterized in that, it is made of five thin film layers; From the titanium alloy surface outwards successively is titanium nitride thin film layer, and its thickness is about 250nm; Titanium carbide thin film layer , its thickness is about 250nm; titanium nitride film layer, its thickness is about 250nm; titanium carbide film layer, its thickness is about 250nm; aluminum-doped diamond-like film layer, its thickness is about 250nm; The thickness is about 1250nm.

[0046] The nano-multilayer film suitable for the surface of titanium alloy obtained in the above-mentioned embodiments 1-3 is prepared by the following system and method:

[0047] A preparation system for nano-multilayer films suitable for the surface of titanium alloys, using electron cyclotron resonance (ECR), two sets of target intermediate frequency magnetron sputtering devices, and a set of ring target D...

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Abstract

The invention provides a nanometer multilayer film suitable for the surface of titanium alloy and a preparation method thereof. The multilayer film is sequentially composed of a titanium nitride film layer, a titanium carbide film layer, a titanium nitride film layer, and a carbonized film layer from the surface of the titanium alloy. Titanium film layer and aluminum-doped diamond-like film layer; the preparation method is to first clean and vacuumize the titanium alloy substrate, sputter-deposit titanium nitride film layer, then sputter-deposit titanium carbide film layer, and then repeatedly deposit nitrogen respectively. Titanium carbide thin film layer and titanium carbide thin film layer are prepared once, and then a layer of aluminum-doped diamond-like carbon thin film layer is prepared, and finally post-sputtering treatment is performed. Compared with the prior art, the multilayer film prepared by the present invention has high yield, convenience, quickness and high efficiency, and the prepared film and substrate, film and film have strong bonding force and small internal stress, and have good resistance Friction and wear performance, suitable for high-intensity operations such as aerospace and geological drilling.

Description

technical field [0001] The invention relates to the technical field of nano-film materials, in particular to a nano-multilayer film suitable for the surface of a titanium alloy and a preparation method thereof. Background technique [0002] Titanium alloy is a new type of structural material, which is widely used in various fields at present, but its disadvantages such as low hardness, high friction coefficient, and poor wear resistance limit its application. Therefore, it is necessary to modify the surface of titanium alloys to prepare functional multilayer films to make them more widely used. [0003] Diamond-like carbon (DLC) films have excellent properties such as high hardness, high wear resistance, and low coefficient of friction. Internal stress and other problems, resulting in delamination, peeling and failure. The introduction of metal Al into the diamond-like carbon film can effectively reduce the internal stress of the film, and at the same time increase the tou...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/35
CPCC23C14/0036C23C14/0605C23C14/0635C23C14/0641C23C14/3407C23C14/352C23C14/355
Inventor 徐照英胡卿卿王锦标苏永要张腾飞伍太宾
Owner CHONGQING UNIV OF ARTS & SCI
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