Optical coating multi-angle umbrella frame and coating machine comprising same

Abstract

The invention relates to the field of optical coating, and discloses an optical coating multi-angle umbrella frame and a coating machine comprising the umbrella frame. The umbrella frame is of an umbrella-shaped structure formed by fixing a plurality of fan-shaped umbrella pieces on umbrella ribs, and each umbrella piece comprises a fan-shaped support (1) and at least one support plate (3) used for containing a coating tray (2), each support plate (3) is parallel to each other, one end of each support plate (3) is rotationally connected to one side of a support (1), and is limited and fixed byan angle limiting mechanism (4), and the other end of each support plate (3) is a free end; and during evaporation, the to-be-coated surface of an optical device (5) to be coated on the coating tray(2) is perpendicular to an evaporation source. According to the umbrella frame, the to-be-coated surfaces of the optical devices to be coated fixed on the umbrella frame and the evaporation source below the umbrella frame are in vertical relation, so that the defects of under-film or film deviation during evaporation can be effectively avoided, and the product yield is improved.

Description

technical field [0001] The invention relates to the field of optical coating, in particular to an optical coating multi-angle umbrella stand and a coating machine comprising the umbrella stand. Background technique [0002] At present, the commonly used coated umbrella stands are mostly one-piece half-cover type, such as figure 1 (a), multi-piece half cover type such as figure 1 (b) or multi-piece flat type such as figure 1 (c), when coating, first place the optical device to be coated on the coating tray, and then fix the coating tray to the umbrella stand, such as figure 2 , put the umbrella stand above the evaporation source in the coating machine, when the environment inside the coating machine reaches the coating environment, rotate the umbrella stand while evaporating the evaporation material, and the evaporation material evaporates from the evaporation source to the surface of the optical device on the coating tray, Complete vapor deposition. [0003] Each umbrel...

AI Technical Summary

Problems solved by technology

[0003] Each umbrella piece of the current coating umbrella stand is a curved structure, and the coating tray is arranged from top to bottom on each umbrella piece, such as image 3 , the inclination angles of the surface to be coated of the optical device to be coated on each coating tray are different from the evaporation source below and are not perpendicular to the evaporation source, so that it is easy to cause the optical device to be coated to have a A part of the surface cannot cover the evaporation material, resulting in film deficiency or film partial defects, such as Figure 4 and 5 As shown, the surface coverage of the vapor-deposited optical device to be coated can only reach 93% (convex lens) to 95% (concave lens), and the yield rate of the product is low, especially for optical devices with aspheric surfaces that are too concave or too convex. The defect is particularly obvious

[0004] In addition, it is also because the structure of the umbrella frame currently used will cause the above-mentioned film undershoot or film partial defect. In order to improve the product yield, the opening angle of the coating tray (such as Image 6 As shown), the opening angle is usually around 120° at present, so that the evaporation material evaporated from the evaporation source can cover the optical device to be coated as fully as possible, but after the coating tray is designed in this way, in order to ensure the strength of the coating tray at the same time , it is necessary to increase the area of ​​the coating tray, that is, the number of optical devices to be coated on the same area of ​​the coating tray is reduced, which also indirectly increases the coating cost

Images